Publications
2023
 Fareeha Safir, Nhat Vu, Loza F. Tadesse, Kamyar Firouzi, Niaz Banaei, Stefanie S. Jeffrey, Amr. A. E. Saleh, Butrus (Pierre) T. KhuriYakub and Jennifer A. Dionne, Combining Acoustic Bioprinting with AIAssisted Raman Spectroscopy for HighTroughput Identification of Bacteria in Blood, Nano Letters, March 01, 2023.
 Associated news article: Andrew Myers, A new way to identify bacteria in fluids, Stanford Engineering News, March 02, 2023.
2022

B. Ma K. Firouzi, B. T. KhuriYakub, Multilayer Masking Technology for Fabricating Airborne CMUTs With MultiDepth Fluidic Trenches, Journal of Microelectromechanical systems, Vol. 31 No. 3, June 2022.
2020

M. L. Prieto, K. Firouzi, B. T. KhuriYakub, D.V. Madison and M. Maduke, Spike frequency–dependent inhibition and excitation of neural activity by highfrequency ultrasound, Journal of General Physiology, Vol. 152 No. 11, October 02, 2020.

L. F. Tadesse, F. Safir, CS Ho, X. Hasbach, B. T. KhuriYakub, S. S. Jeffrey, A. E. Saleh and J. Dionne, Toward Rapid Infectious Disease Diagnosis with Advances in Surfaceenhanced Raman Spectroscopy, The Journal of Chemical Physics, vol. 152, no. 24, June 30, 2020.
2019

K. Firouzi, P. Ghanouni, B.T. KhuriYakub, "Transcranial Focused Ultrasound Delivery using Guided Waves", IEEE Trans. Ultrason., Ferroelect., Freq. Control, (under review).

B. Ma, K. Firouzi, K. Brenner, B. T. KhuriYakub, Wide Bandwidth and Low Driving Voltage Vented CMUTs for Airborne Applications, IEEE Trans. Ultrason., Ferroelect., Freq. Control, vol. 66, no. 11, Nov. 2019.

S. R. Kothapalli, G. A. Sonn, J. W. Choe, A. Nikoozadeh, A. Bhuyan, K. K. Park, P. Cristman, R. Fan, A. Moini, B. C. Lee, J. Wu, T. E. Carver, D. Trivedi, L. Shiiba, I. Steinberg, D. M. Huland, M. F. Rasmussen, J. C. Liao, J. D. Brooks, B. T. KhuriYakub, S. S. Gambhir, Simultaneous transrectal ultrasound and photoacoustic human prostate imaging, Science Translational Medicine, vol. 11, no. 507, 2019.

M. Menz, P. Ye, K. Firouzi, A. Nikoozadeh, B. T. KhuriYakub, and S. Baccus, Radiation Force as a Physical Mechanism for Ultrasonic Neurostimulation of the Ex Vivo Retina, Journal of Neuroscience, vol. 39, no. 32, pp 62516264, 2019.

K. Brenner, A.S. Ergun, K. Firouzi, M.F. Rasmussen, Q. Stedman, B.T. Khuri–Yakub, Advances in Capacitive Micromachined Ultrasonic Transducers, Micromachines, vol. 10, no. 2, 2019.
2018

K. Firouzi, P. Ghanouni, B. T. KhuriYakub, "Efficient transcranial ultrasound delivery via excitation of Lamb waves", presented at the 6th International Symposium on Focused Ultrasound, Reston, Virginia, Oct. 2125, 2018.

R. T. Zaman, S. Yousefi, S. R. Long, T. Saito, M. Mandella, Z. Qiu, R. Chen, C. H. Contag, S. S. Gambhir, F. T. Chin, B. T. KhuriYakub, M. V. McConnell, K. K. Shung, and . XingA, “DualModality Hybrid Imaging System Harnesses Radioluminescence and Sound to Reveal Molecular Pathology of Atherosclerotic Plaques,” Scientific Reports, volume 8, article number: 8992, 2018.

I. O. Wygant, M. Kupnik, and Pierre T KhuriYakub, “An Analytical Model for Capacitive Pressure Transducers With Circular Geometry”, Journal of Microelectromechanical Systems PP(99):19, 2018.

A. Sawaby, M. L. Wang, E. So, J.C. Chien, H. Nan, B. T. KhuriYakub, A. Arbabian, “A Wireless Implantable Ultrasound Array Receiver for Thermoacoustic Imaging,” 2018 Symp. on VLSI Circuits, Honolulu, HI, June 1822, 2018.

M. L. Prieto, K. Firouzi, B. T. KhuriYakub, M. Maduke, “Activation of Piezo1 but Not NaV1.2 Channels by Ultrasound at 43 MHz," Ultrasound in Medicine & Biology, Volume 44, Issue 6, pp 12171232, 2018.

K. Chen, B. C. Lee, K. E. Thomenius, B. T. KhuriYakub, H. Lee and C. G. Sodini, A ColumnRowParallel Ultrasound Imaging Architecture for 3D PlaneWave Imaging and Tx SecondOrder Harmonic Distortion Reduction, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 65, no. 5, pp. 828843, May 2018.
2017

K. Firouzi and B. T. KhuriYakub, "Multitouch ultrasonic touchscreen," J. Acoust. Soc. Am., vol. 142, no. 4, pp. 26432643, New Orleans, Dec. 2017.

K. Firouzi, P. Ghanouni, B. T. KhuriYakub, “Efficient Transcranial Ultrasound Delivery Via Excitation of Lamb Waves”, Ultrasonics Symposium (IUS), 2017 IEEE International, Washington DC, 2017, pp. 14.

K. Firouzi, A. Nikoozadeh, T. E. Carver, B. T. KhuriYakub, Butrus, “Multitouch Touchscreen Using Reverberant Lamb Waves”, Ultrasonics Symposium (IUS), 2017 IEEE International, Washington DC, 2017, pp. 14.

J. H. Jang, C. Chang, M. F. Rasmussen, A. Moini, K. Brenner, D. N. Stephens, O. Oralkan, B. T. KhuriYakub, “Integration of a DualMode Catheter for Ultrasound Image Guidance and HIFU Ablation Using a 2D CMUT Array”, Ultrasonics Symposium (IUS), 2017 IEEE International, Washington DC, 2017, pp. 14.

B. Ma, C. Chang, H. K. Oguz, K. Firouzi, B. T. KhuriYakub, “MultiParameter Optimization of Vented CMUTs for Airborne Applications”, Ultrasonics Symposium (IUS), 2017 IEEE International, Washington DC, 2017, pp. 14.

A. Rekhi, B. T. KhuriYakub, A. Arbabian, ”Wireless Power Recovery for Internet of Things Devices Using PreCharged CMUTs”, Ultrasonics Symposium (IUS), 2017 IEEE International, Washington DC, 2017, pp. 14.

Q. Stedman, K. K. Park, B.T. KhuriYakub, “An 8Channel CMUT Chemical Sensor Array on a Single Chip”, Ultrasonics Symposium (IUS), 2017 IEEE International, Washington DC, 2017, pp. 14.

J. Wang, F. Memon, G. Touma, S. Baltsavias, J. H. Jang, C. Chang, M. F. Rasmussen, E. Olcott, R. B. Jeffrey, A. Arbabian, B. T. KhuriYakub, “Capsule Ultrasound Device: Characterization and Testing Results”, Ultrasonics Symposium (IUS), 2017 IEEE International, Washington DC, 2017, pp. 14.

H. S. Yoon, S. Vaithilingam, K. K. Park, A. Nikoozadeh, K. Firouzi, J. W. Choe, R. D. Watkins, H. K. Oguz, M. Kupnik, K. B. Pauly, and B. T. KhuriYakub, "A 1MHz 2D CMUT array for HIFU thermal ablation", AIP Conference Proceedings 1821, 050003, 2017.

K. Firouzi and B. T. KhuriYakub, "Localization of weak objects in reverberant fields using waveform inversion," J. Acoust. Soc. Am., vol. 142, no. 2, pp. 10881097, 2017.

K. Firouzi and B. T. KhuriYakub, "A kspace Pseudospectral Method for Elastic Wave Propagation in Heterogeneous Anisotropic Media," IEEE Trans. Ultrason., Ferroelect., Freq. Control, vol. 64, no. 4, pp. 749760, 2017.

K. Firouzi and B. T. KhuriYakub, "A Learning Method for Localization of Objects in Reverberant Domains with Limited Measurements," J. Acoust. Soc. Am., vol. 141, no. 1, pp. 104115, 2017.
2016

K. Firouzi, A. Nikoozadeh and B. T. KhuriYakub, "Lamb Wave Multitouch Ultrasonic Touchscreen," IEEE Trans. Ultrason., Ferroelect., Freq. Control, vol. 63, no. 12, pp. 21742186, 2016.

H. S. Yoon, C. L. Chang, J. H. Jang, A. Bhuyan, J. W. Choe, A. Nikoozadeh, R. Watkins, D. Stephens, K. Butts Pauly, B. T. KhuriYakub, "HIFU experiments using a 32×32element CMUT array," IEEE Trans. Ultrason., Ferroelect., Freq. Control, vol. 63, no. 12, pp. 21502158, Dec. 2016.

G. Alexopoulos, K. C. Boyle, N. Dolatsha, H. Nan, B. T. KhuriYakub, and A. Arbabian. "Standoff tracking of medical interventional devices using noncontact microwave thermoacoustic detection," In Microwave Symposium (IMS), 2016 IEEE MTTS International, pp. 14. IEEE, 2016.

T. C. Chang, M. Weber, M. Wang, J. Charthad, B. KhuriYakub, and A. Arbabian. "Design of Tunable Ultrasonic Receivers for Efficient Powering of Implantable Medical Devices with Reconfigurable Power Loads." IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 63, no. 10 (2016).

F. Memon, G. Touma, J. Wang, S. Baltsavias, A. Moini, C. Chang, M. F. Rasmussen, A. Nikoozadeh, J. W. Choe, E. Olcott, R. B. Jeffrey, A. Arbabian, and B. T. KhuriYakub."Capsule Ultrasound Device: Further Developments," Ultrasonics Symposium (IUS), 2016 IEEE International, Tours, 2016, pp. 14.

A. Moini, A. Nikoozadeh, J. W. Choe, C. Chang, D. N. Stephens, D. J. Sahn, and P. T. KhuriYakub. "Fully Integrated 2D CMUT Ring Arrays for Endoscopic Ultrasound," Ultrasonics Symposium (IUS), 2016 IEEE International, Tours, 2016, pp. 14.

Q. Stedman, K. K. Park, and B. T. KhuriYakub. "CMUT Chip with Integrated Temperature and Pressure Sensors," Ultrasonics Symposium (IUS), 2016 IEEE International, Tours, 2016, pp. 14.

D. N. Stephens, J. Foiret, S. Lucero, K. W. Ferrara, K. Shivkumar, and P. KhuriYakub. "HIFU Power Network Optimization for Catheter Based Cardiac Interventions," Ultrasonics Symposium (IUS), 2016 IEEE International, Tours, 2016, pp. 14.

I. O. Wygant, M. Kupnik, and B. T. KhuriYakub. "CMUT Design Equations for Optimizing Noise Figure and Source Pressure," Ultrasonics Symposium (IUS), 2016 IEEE International, Tours, 2016, pp. 14.
2015

A. Moini, A. Nikoozadeh, J. W. Choe, C. Chang, D. Stephens, L. S. Smith, D. Sahn, and B. T. KhuriYakub. "Fabrication, Packaging, and Catheter Assembly of 2D CMUT Arrays for Endoscopic Ultrasound and Cardiac Imaging." ASME 2015 InterPACKICNMM. American Society of Mechanical Engineers, 2015.

Ji Hoon Jang et al., "Dualmode integrated circuit for imaging and HIFU with 2D CMUT arrays," Ultrasonics Symposium (IUS), 2015 IEEE International, Taipei, 2015, pp. 14.

Byung Chul Lee, A. Nikoozadeh, Kwan Kyu Park and B. T. KhuriYakub, "Experimental study of mutual acoustic coupling in CMUTs with substrateembedded springs," Ultrasonics Symposium (IUS), 2015 IEEE International, Taipei, 2015, pp. 14.

D. N. Stephens, J. Foiret, S. Lucero, K. W. Ferrara, K. Shivkumar and P. KhuriYakub, "10 MHz catheterbased annular array for thermal strain guided intramural cardiac ablations," Ultrasonics Symposium (IUS), 2015 IEEE International, Taipei, 2015, pp. 14.

F. Memon et al., "Capsule ultrasound device," Ultrasonics Symposium (IUS), 2015 IEEE International, Taipei, 2015, pp. 14.

Ting Chia Chang, M. Weber, J. Charthad, A. Nikoozadeh, P. T. KhuriYakub and A. Arbabian, "Design of highefficiency miniaturized ultrasonic receivers for powering medical implants with reconfigurable power levels," Ultrasonics Symposium (IUS), 2015 IEEE International, Taipei, 2015, pp. 14.

T.Y. Wang, J. W. Choe, K. Pu, R. Devulapally, S. Bachawal, S. Machtaler, S. M. Chowdhury, R. Luong, L. Tian, B. KhuriYakub, J. Rao, R. Paulmurugan, and J. K. Willmann, "Ultrasoundguided delivery of microRNA loaded nanoparticles into cancer,"J. Controlled Release, 203, pp. 99108, Apr. 2015.

H. Nan, K. C. Boyle, N. Apte, M. S. Aliroteh, A. Bhuyan, A. Nikoozadeh, B. T. KhuriYakub, and A. Arbabian, "Noncontact thermoacoustic detection of embedded targets using airbornecapacitive micromachined ultrasonic transducers,"Applied Physics Letters, 106, Feb. 2015.
2014

M. Birk, A. Burshtein, T. Chernyakova, A. Eilam, J. W. Choe, A. Nikoozadeh, P. KhuriYakub, and Y. C. Eldar, "Compressed 3D Ultrasound Imaging with 2D Arrays,"Proc. IEEE ICASSP , pp. 69196923, 2014.

K. Firouzi, A. Nikoozadeh and B. T. KhuriYakub, "Extension of the kspace method to the bioheat transfer equation in heterogeneous anisotropic tissue.,"Presented at the 14th International Symposium on Therapeutic Ultrasound, Las Vegas, US, April 25, 2014.

K. Firouzi, A. Nikoozadeh and B. T. KhuriYakub, "Threedimensional nonlinear pressure and temperature field simulation of 2D transducer arrays in heterogeneous media.,"Presented at the 14th International Symposium on Therapeutic Ultrasound, Las Vegas, US, April 25, 2014.

K. Firouzi, A. Nikoozadeh, and B. T. KhuriYakub, "Numerical Modeling of Ultrasonic Touchscreen,"presented at the IEEE Ultrasonics Symposium, Chicago, Illinois, Sept. 36, 2014.

K. Firouzi, A. Nikoozadeh, and B. T. KhuriYakub, "Modeling Elastic Waves in Heterogeneous Anisotropic Media using a kSpace Method,"presented at the IEEE Ultrasonics Symposium, Chicago, Illinois, Sept. 36, 2014.

K. Chen, B. C. Lee, K. Thomenius, B. T. KhuriYakub, H.S. Lee, and C. G. Sodini, "A ColumnRowParallel Ultrasound Imaging Architecture for 3D Planewave Imaging and Tx 2ndOrder Harmonic Distortion (HD2) Reduction,"presented at the IEEE Ultrasonics Symposium, Chicago, Illinois, Sept. 36, 2014.

B. C. Lee, A. Nikoozadeh, K. K. Park, and B. T. KhuriYakub, "NonFlexural Parallel Piston Movement across CMUT with SubstrateEmbedded Springs,"presented at the IEEE Ultrasonics Symposium, Chicago, Illinois, Sept. 36, 2014.

Q. Stedman, K. K. Park, and B. T. KhuriYakub, "Distinguishing Chemicals Using CMUT Chemical Sensor Array and Artifical Neural Networks,"presented at the IEEE Ultrasonics Symposium, Chicago, Illinois, Sept. 36, 2014.

N. Apte, K. K. Park, A. Nikoozadeh, and B. T. KhuriYakub, "Bandwidth and Sensitivity Optimization in CMUTs for Airborne Applications,"presented at the IEEE Ultrasonics Symposium, Chicago, Illinois, Sept. 36, 2014.

C. Chang, K. Firouzi, K. K. Park, A. F. Sarioglu, A. Nikoozadeh, H. S. Yoon, S. Vaithilingam, T. Carver and B. T. KhuriYakub, "Acoustic lens for capacitive micromachined ultrasonic transducers.,"J. Micromech. Microeng., 24, 085007, Jul. 2014.

C. Chang, A. Moini, A. Nikoozadeh, A. F. Sarioglu, N. Apte, X. Zhuang and B. T. KhuriYakub, "Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers,"J. Micromech. Microeng., 24, 107002, Sept. 2014.
2013

A. Bhuyan, C. Chang, J. W. Choe, B. C. Lee, A. Nikoozadeh, Ö. Oralkan, and B. T. KhuriYakub, "A 32×32 Integrated CMUT Array for Volumetric Ultrasound Imaging,"presented at the IEEE Ultrasonics Symposium, Prague, Czech Republic, Jul. 2125, 2013.

B. C. Lee, A. Nikoozadeh, K. K. Park, and B. T. KhuriYakub, "Fabrication of CMUTs with Substrateembedded Springs,"presented at the IEEE Ultrasonics Symposium, Prague, Czech Republic, Jul. 2125, 2013.

M. Hoffman, A. Unger, M.C. Ho, K. K. Park, B. T. KhuriYakub, and M. Kupnik, "Volumetric Characterization of Ultrasonic Transducers for Gas Flow Metering,"presented at the IEEE Ultrasonics Symposium, Prague, Czech Republic, Jul. 2125, 2013.

A. Unger, M. Hoffman, M.C. Ho, K. K. Park, B. T. KhuriYakub, and M. Kupnik, "Finite Element Analysis of Mechanically Amplified CMUTs,"presented at the IEEE Ultrasonics Symposium, Prague, Czech Republic, Jul. 2125, 2013.

M.C. Ho, K. K. Park, K. Eckhoff, M. Kupnik, and B. T. KhuriYakub, "Aircouple CMUTs operating at ambient pressures ranging from 1 to 20 atm,"presented at the IEEE Ultrasonics Symposium, Prague, Czech Republic, Jul. 2125, 2013.

N. Apte, K. K. Park, and B. T. KhuriYakub, "Experimental evaluation of CMUTs with vented cavities under varying pressure,"presented at the IEEE Ultrasonics Symposium, Prague, Czech Republic, Jul. 2125, 2013.

A. Nikoozadeh, C. Chang, J. W. Choe, A. Bhuyan, B. C. Lee, A. Moini, and B. T. KhuriYakub, "An Integrated Ring CMUT Array for Endoscopic Ultrasound and Photoacoustic Imaging,"presented at the IEEE Ultrasonics Symposium, Prague, Czech Republic, Jul. 2125, 2013.

J. W. Choe, A. Nikoozadeh, O. Oralkan, and B. T. KhuriYakub, "GPUBased RealTime Imaging Software Suite for Medical Ultrasound,"presented at the IEEE Ultrasonics Symposium, Prague, Czech Republic, Jul. 2125, 2013.

A. Bhuyan, J. W. Choe, B. C. Lee, I. Wygant, A. Nikoozadeh, O. Oralkan, and B. T. KhuriYakub, "3D Volumetric Ultrasound Imaging with a 32x32 CMUT Array Integrated with FrontEnd ICs Using FlipChip Bonding Technology,"presented at ISSCC 2013, San Francisco, CA, Feb. 2013.

A. Bhuyan, J. W. Choe, B. C. Lee, I. O. Wygant, A. Nikoozadeh, Ö. Oralkan, and B. T. KhuriYakub, "Integrated Circuits for Volumetric Ultrasound Imaging With 2D CMUT Arrays,"Biomedical Circuits and Systems, IEEE Transactions on, vol. 7, no. 6, Dec. 2013.

M. L. Prieto, O. Oralkan, B. T. KhuriYakub, and M. C. Maduke, "Dynamic Response of Model Lipid Membranes to Ultrasonic Radiation Force,"PLOS ONE, vol. 8, no. 10, Oct. 2013.

A. Kamaya, S. Vaithilingam, B. I. Chung, O. Oralkan, and B. T. KhuriYakub, "Photoacoustic Imaging of the Bladder,"J. Ultrasound Med, vol 32, pp. 12451250, Jul. 2013.

A. Kamaya, S. Machtaler, S. S. Sanjani, A. Nikoozadeh, F. G. Sommer, B. T. KhuriYakub, J. K. Willman, and T. S. Desser, "New Technologies in Clinical Ultrasound,"Semin. Roentgenol., vol. 48, no. 3, pp. 216223, Jul. 2013.

D.S Lin, R. Wodnicki, X. Zhang, C. Woychik, K. E. Thomenius, R. A. Fisher, D. M. Mills, A. J. Byun, W. Burdick, P. KhuriYakub, B. Bonitz, T. Davies, G. Thomas, B. Otto, M. Topper, T. Fritzsch, and O. Ehrmann, "Packaging and Modular Assembly of LargeArea and FinePitch 2D Ultrasonic Transducer Arrays,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 60, no. 7, pp. 13561375, Jul. 2013.

J. W. Choe, A. Nikoozadeh, O. Oralkan, and B. T. KhuriYakub, "GPUBased RealTime Volumetric Ultrasound Image Reconstruction for a Ring Array,"Medical Imaging, IEEE Transactions on, vol 32, no 7, pp 12581264, Jul. 2013.

K. K. Park, O. Oralkan, and B. T. KhuriYakub, "A Comparison Between Conventional and CollapseMode Capacitive Micromachined Ultrasonic Transducers in 10MHz 1D Arrays,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 60, no. 6, pp 12451255, June 2013.

K. K. Park, and B. T. KhuriYakub, "3D airborne ultrasound synthetic aperture imaging based on capacitive micromachined ultrasonic transducers,"Ultrasonics, vol 53, pp 13551362, Apr 2013.

M. D. Menz, O. Oralkan, P. T. KhuriYakub, and S. A. Baccus, "Precise Neural Stimulation in the Retina Using Focused Ultrasound,"J. Neuroscience, vol. 33, no. 10, pp 45504560, Mar 2013.
2012

A. Nikoozadeh, J. W. Choe, S. Kothapalli, A. Moini, S. S. Sanjani, A. Kamaya, O. Oralkan, S. S. Gambhir, and P. T. KhuriYakub, "Photoacoustic Imaging Using a 9F MicroLinear CMUT ICE Catheter,"presented at the IEEE Ultrasonics Symposium, Dresden, Germany, Oct. 710, 2012.

N. Apte, K. K. Park, and B. T. KhuriYakub, "Finite Element Analysis of CMUTs with Pressurized Cavities,"presented at the IEEE Ultrasonics Symposium, Dresden, Germany, Oct. 710, 2012.

M.C. Ho, M. Kupnik, K. K. Park, and B. T. KhuriYakub, "Longterm measurement results of precharged CMUTs with zero external bias operation,"presented at the IEEE Ultrasonics Symposium, Dresden, Germany, Oct. 710, 2012.

M.C. Ho, M. Kupnik K. K. Park, K. Eckhoff, and B. T. KhuriYakub, "Wide pressure range operation of aircoupled CMUTs,"presented at the IEEE Ultrasonics Symposium, Dresden, Germany, Oct. 710, 2012.

H. J. Lee, K. K. Park, M. Kupnik, and B. T. KhuriYakub, "Functionalization layers for CO2 sensing using capacitive micromachined ultrasonic transducers,"Sensors and Actuators B: Chemical, vol. 174, pp. 87–93, Nov. 2012.

K. K. Park, and B. T. KhuriYakub, "Dynamic response of an array of flexural plates in acoustic medium,"J. Acoust. Soc. Am., vol.132, Issue 4, pp. 22922303, Aug. 2012.

J. W. Choe, Ö. Oralkan, A. Nikoozadeh, M. Gencel, D. N. Stephens, M. O’Donnell, D. J. Sahn, and B. T. KhuriYakub, "Volumetric RealTime Imaging Using a CMUT Ring Array,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 59, no. 6, pp. 12011211, June 2012.

H. J. Lee, K. K. Park, M. Kupnik, N. A. Melosh, and B. T. KhuriYakub, "Mesoporous ThinFilm on HighlySensitive Resonant Chemical Sensor for Relative Humidity and CO2 Detection,"Analytical Chemistry, vol. 84, no. 7, pp. 3063–3066, Feb. 2012.

A. F. Sarioglu, M. Kupnik, S. Vaithilingam, and B. T. KhuriYakub , "Nanoscale Topography of ThermallyGrown Oxide Films at RightAngled Convex Corners of Silicon,"J. Electrochemical Soc., vol. 159, no. 2, pp. H79H84, 2012.

D. N. Stephens, U. T. Truong, A. Nikoozadeh, O. Oralkan, C. H. Seo, J. Cannata, A. Dentinger, K. Thomenius, A. de la Rama, T. Nguyen, F. Lin, P. KhuriYakub, A. Mahajan, K. Shivkumar, M. O'Donnell, and D. J. Sahn, "First In Vivo Use of a Capacitive Micromachined Ultrasound Transducer ArrayBased Imaging and Ablation Catheter,"J. Ultrasound Med., vol. 31, pp. 247256, 2012.
2011

J. W. Choe, O. Oralkan, A. Nikoozadeh, A. Bhuyan, B. C. Lee, M. Gencel, and B. T. KhuriYakub, "RealTime Volumetric Imaging System for CMUT Arrays,"presented at the IEEE Ultrasonics Symposium, Orlando, FL, Oct. 1821, 2011.

A. Moini, A. Nikoozadeh, Ö. Oralkan, J. w. Choe, A. F. Sarioglu, D. N. Stephens, A. de la Rama, P. Chen, C. Chalek, A. Dentinger, D. Wildes, L. S. Smith, K. Thomenius, K. Shivkumar, A. Mahajan, M. O’Donnell, D. J. Sahn, and P. T. KhuriYakub, "Volumetric Intracardiac Imaging Using a Fully Integrated CMUT Ring Array: Recent Developments,"presented at the IEEE Ultrasonics Symposium, Orlando, FL, Oct. 1821, 2011.

K. K. Park, O. Oralkan, and B. T. KhuriYakub, "Comparison of conventional and collapsemode CMUT in 1D array configuration,"presented at the IEEE Ultrasonics Symposium, Orlando, FL, Oct. 1821, 2011.

M.C. Ho, M. Kupnik, S. Vaithilingam, and B. T. KhuriYakub1, "Fabrication and model validation for CMUTs operated in permanent contact mode,"presented at the IEEE Ultrasonics Symposium, Orlando, FL, Oct. 1821, 2011.

N. Apte, S. Vaithilingam, A. F. Sarioglu, M. Kupnik, and B. T. KhuriYakub, "Large Area 1D CMUT Phased Arrays for MultiModality Ultrasound Imaging,"presented at the IEEE Ultrasonics Symposium, Orlando, FL, Oct. 1821, 2011.

B. C. Lee, A. Nikoozadeh, K.K. Park, and B. T. KhuriYakub, "Understanding CMUTs with SubstrateEmbedded Springs,"presented at the IEEE Ultrasonics Symposium, Orlando, FL, Oct. 1821, 2011.

P. Cristman, O. Oralkan, M. Mandella, O. Solgaard, C. Contag, and B. T. KhuriYakub, "Interdigitated Annular CMUT Arrays for Ultrasound Assisted Delivery of Fluorescent Contrast Agents,"presented at the IEEE Ultrasonics Symposium, Orlando, FL, Oct. 1821, 2011.

M. Kupnik, M.C. Ho, S. Vaithilingam, and B. T. KhuriYakub, "CMUTs for Air Coupled Ultrasound with Improved Bandwidth,"presented at the IEEE Ultrasonics Symposium, Orlando, FL, Oct. 1821, 2011.

A. Bhuyan, J. W. Choe, B. C. Lee, P. Cristman, Ö. Oralkan, and B. T. KhuriYakub, "Miniaturized, Wearable, Ultrasound Probe for OnDemand Ultrasound Screening,"presented at the IEEE Ultrasonics Symposium, Orlando, FL, Oct. 1821, 2011.

K. K. Park, H. Lee, M. Kupnik, Ö. Oralkan, J.P. Ramseyer, H. P. Langc, M. Hegner, C. Gerber, B. T. KhuriYakub, "Capacitive micromachined ultrasonic transducer (CMUT) as a chemical sensor for DMMP detection,"Sensors and Actuators B: Chemical, vol. 20, no. 1, pp. 11201127 , Dec. 2011.

H. J. Lee, K. K. Park, M. Kupnik, Ö. Oralkan, and B. T. KhuriYakub, "Chemical Vapor Detection Using a Capacitive Micromachined Ultrasonic Transducer,"Analytical Chemistry, vol. 83, no. 24, pp. 9314–9320, Nov. 2011.

C. H. Seo, D. N. Stephens, J. Cannata, A. Dentinger, F. Lin, S. Park, D. Wildes, K. E. Thomenius, P. Chen, T. Nguyen, A. de La Rama, J. S. Jeong, A. Mahajan, K. Shivkumar, A. Nikoozadeh, O. Oralkan, U. Truong, D. J. Sahn, P. T. KhuriYakub, M. O'Donnell, "The Feasibility of Using Thermal Strain Imaging to Regulate Energy Delivery During Intracardiac RadioFrequency Ablation,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 58, no. 7, pp. 140616, Jul. 2011.

B. T. KhuriYakub, and O. Oralkan, "Capacitive micromachined ultrasonic transducers for medical imaging and therapy,"Micromechanics and Microengineering, Journal of, vol. 21, no. 5, pp. 5400415, Apr. 2011.

K. K. Park, H. Lee, M. Kupnik, and B. T. KhuriYakub, "Fabrication of capacitive micromachined ultrasonic transducers via local oxidation and direct wafer bonding,"Microelectromechanical Systems, Journal of, vol. 20, no. 2, pp. 95103, Feb. 2011.
2010

K. K. Park, H. J. Lee, M. Kupnik, O. Oralkan, and B. T. KhuriYakub, "Zerobias resonant sensor with an oxidenitride layer as charge trap,"Proc. IEEE Sensors Conf., pp. 10241028, 2010.

B. T. KhuriYakub, Ö. Oralkan, A. Nikoozadeh, I. O. Wygant, S. Zhuang, M. Gencel, J. W. Choe, D. N. Stephens, A. de la Rama, P. Chen, F. Lin, A. Dentinger, D. Wildes, K. Thomenius, K. Shivkumar, A. Mahajan, C. H. Seo, M. O’Donnell, U. Truong, and D. J. Sahn, "Miniaturized Ultrasound Imaging Probes Enabled by CMUT Arrays with Integrated Frontend Electronic Circuits,"Proc. IEEE EMBS Conf., pp. 59875990, 2010.

H. J. Lee, K. K. Park, M. Kupnik, O. Oralkan, and B. T. KhuriYakub, "Highly sensitive detection of DMMP using a CMUTbased chemical sensor,"Proc. IEEE Sensors Conf., pp. 21222126, 2010.

A. Nikoozadeh and P. T. KhuriYakub, "CMUT with substrateembedded springs for nonflexural plate movement,"presented at the IEEE Ultrasonics Symposium, San Diego, CA, Oct. 1114, 2010.

Y. Tsuji, M. Kupnik, and B. T. KhuriYakub, "Low temperature process for CMUT fabrication with wafer bonding technique,"presented at the IEEE Ultrasonics Symposium, San Diego, CA, Oct. 1114, 2010.

M. Kupnik, S. Vaithilingam, K. Torashima, I. O. Wygant, and B. T. KhuriYakub, "CMUT fabrication based on a thick buried oxide layer,"presented at the IEEE Ultrasonics Symposium, San Diego, CA, Oct. 1114, 2010.

M.C. Ho, M. Kupnik, and B. T. KhuriYakub, "FEA of CMUTs suitable for wide gas pressure range applications,"presented at the IEEE Ultrasonics Symposium, San Diego, CA, Oct. 1114, 2010.

K. K. Park, M. Kupnik, H. J. Lee, I. O. Wygent, and B. T. KhuriYakub, "Modeling and measuring the effects of mutual impedance on multicell CMUT configurations,"presented at the IEEE Ultrasonics Symposium, San Diego, CA, Oct. 1114, 2010.

D. Bæk , Ö. Oralkan, M. Kupnik , M. Willatzen, B. T. KhuriYakub, and J. A. Jensen, "Simulating CMUTs using Field II,"presented at the IEEE Ultrasonics Symposium, San Diego, CA, Oct. 1114, 2010.

C. H. Seo , D. Stephens , J. Cannata , A. Dentinger, F. Lin, S. Park, D. Wildes, K. Thomenius, P. Chen, T. Nguyen, A. Delarama, J. S. Jeong, A. Mahajan, K. Shivkumar , O. Oralkan, D. Sahn, P. KhuriYakub, M. O’Donnell, "Monitoring radiofrequency catheter ablation using thermal strain imaging,"presented at the IEEE Ultrasonics Symposium, San Diego, CA, Oct. 1114, 2010.

J. W. Choe, Ö. Oralkan, and P. T. KhuriYakub, "Design optimization for a 2D sparse transducer array for 3D ultrasound imaging,"presented at the IEEE Ultrasonics Symposium, San Diego, CA, Oct. 1114, 2010.

T.J. Ma, S. R. Kothapalli, S. Vaithilingam, Ö. Oralkan, A. Kamaya, I. O. Wygant, X. Zhuang, S. S. Gambhir, R. B. Jeffrey, Jr., and B. T. KhuriYakub, "3D deep penetration photoacoustic imaging with a 2D CMUT array,"presented at the IEEE Ultrasonics Symposium, San Diego, CA, Oct. 1114, 2010.

A. Nikoozadeh, Ö. Oralkan, M. Gencel, J. W. Choe, D. N. Stephens, A. de la Rama, P. Chen, F. Lin, A. Dentinger, D. Wildes, K. Thomenius, K. Shivkumar, A. Mahajan, C. H. Seo, M. O’Donnell, U. Truong, D. J. Sahn, and P. T. KhuriYakub, "Forwardlooking intracardiac imaging catheters using fully integrated CMUT arrays,"presented at the IEEE Ultrasonics Symposium, San Diego, CA, Oct. 1114, 2010.

D. Stephens, J. Cannata, C. H. Seo, J.S. Jeong, E. Sun, W. Cao, A. Nikoozadeh, O. Oralkan, A. de la Rama, T. Nguyen, A. Dentinger, F. Lin, S. Park, D. Wildes, K. Thomenius, K. Shung, K. Shivkumar, A. Mahajan, U. Truong, M. O'Donnell, P. KhuriYakub, and D. Sahn, "Ultrasound compatible RF ablation electrode design for catheter based guidance of RF ablation  in vivo results with thermal strain imaging,"presented at the IEEE Ultrasonics Symposium , San Diego, CA, Oct. 1114, 2010.

D.S. Lin, X. Zhuang, R. Wodnicki, C. G. Woychik, M. Kupnik, O. Oralkan, and B. T. KhuriYakub, "Packaging of large and lowpitch size 2D ultrasonic transducer arrays,"Proc. 23th IEEE MEMS Conference, Hong Kong, pp. 508511, 2010.

H.S. Yoon, M.C. Ho, N. Apte, P. Cristman, S. Vaithilingam, M. Kupnik, K. B. Pauly, and B. T. KhuriYakub, "Fabrication of CMUT Cells with Gold Center Mass for Higher Output Pressure,"AIP Conf. Proc., 10th International Symposium on Therapeutic Ultrasound, pp. 183188, 2010.

D. S. Lin, X. Zhuang, S. H. Wong, M. Kupnik, and B. T. KhuriYakub, "Encapsulation of capacitive micromachined ultrasonic transducers using viscoelastic polymer,"Microelectromechanical Systems, Journal of, vol. 19, no. 6, pp. 13411351, Dec. 2010.

J. Levi, S. R. Kothapalli, T.J. Ma, K. Hartman, B. T. KhuriYakub, and S. S. Gambhir, "Design, Synthesis, and Imaging of an Activatable Photoacoustic Probe ,"American Chemical Society, Journal of, vol. 132, no. 32, pp. 1126411269, Jul. 2010.

A. de la Zerda, Z. Liu, S. Bodapati, R. Teed, S. Vaithilingam, B. T. KhuriYakub, X. Chen, H. Dai, and S. S. Gambhir, "Ultrahigh Sensitivity Carbon Nanotube Agents for Photoacoustic Molecular Imaging in Living Mice ,"Nano Letters, vol. 10, no. 6, pp. 21682172, Jun. 2010.

A. de la Zerda, Y. M. Paulus, R. Teed, S. Bodapati, Y. Dollberg, B. T. KhuriYakub, M. S. Blumenkranz, D. M. Moshfeghi, and S. S. Gambhir, "Photoacoustic ocular imaging ,"Optics Letters, vol. 35, no. 3, pp. 270272, Feb. 2010.

S. H. Wong, M. Kupnik, R. D. Watkins, K. B. Pauly, and B. T. KhuriYakub, "Capacitive Micromachined Ultrasonic Transducers for Therapeutic Ultrasound Applications ,"Biomedical Engineering, IEEE Transactions on, vol. 57, no. 1, pp. 114123, Jan. 2010.

M. Kupnik and B. T. KhuriYakub, "Waferbonded CMUT meets CMOS  MEMSbased ultrasonic transducer arrays including electronics integration,"invited talk at CMOS Emerging Technology Workshop, Whistler, Canada, , May, 2010.

S. J. Cunningham and M. Kupnik, "Wafer Bonding," Chapter for MEMS Materials and Process Handbook, Springer, in print, 2010.
2009

A. Nikoozadeh, Ö. Oralkan, M. Gencel, J. W. Choe, D. N. Stephens, A. de la Rama, P. Chen, K. Thomenius, A. Dentinger, D. Wildes, K. Shivkumar, A. Mahajan, M. O’Donnell, D. Sahn and P. T. KhuriYakub, "Forwardlooking volumetric intracardiac imaging using a fully integrated CMUT ring array,"presented at the IEEE Ultrason. Symp., Rome, Italy, September 2009.

I. O. Wygant, M. Kupnik, and B. T. KhuriYakub, "CMUT design equations for optimizing noise figure and source pressure,"presented at the IEEE Ultrason. Symp., Rome, Italy, September 2009.

R. Wodnicki, C. G. Woychik, A. T. Byun, R. Fisher, K. Thomenius, D.S. Lin, X. Zhuang, O. Oralkan, S. Vaithilingam and B. T. KhuriYakub, "Multirow linear cMUT array using cMUTs and multiplexing electronics,"presented at the IEEE Ultrason. Symp., Rome, Italy, September 2009.

D.S. Lin, X. Zhuang, J. Faruque, Ö. Oralkan, S. Napel, R. B. Jeffrey, and B. T. KhuriYakub, "Carotid peak blood velocity detection using a 5plane CMUT array with asymmetric acoustic lens: initial results,"presented at the IEEE Ultrason. Symp., Rome, Italy, September 2009.

P. Cristman, O. Oralkan, X. Zhuang, T.J. Ma, S. Vaithilingam, T. Carver, I. Wygant, and B. T. KhuriYakub, "A 2D CMUT hydrophone array: characterization results,"presented at the IEEE Ultrason. Symp., Rome, Italy, September 2009.

D. J. Sahn, S. N. Douglas, J. M. Cannata, K. K. Shung, O. Oralkan, A. Nikoozadeh, B. T. KhuriYakub, H. Nguyen, P. Chen, A. M. Dentinger, D. Wildes, K. E. Thomenius, A. Mahajan, K. Shivkumar, M. O’Donnell, , "A family of intracardiac ultrasound imaging devices designed for guidance of electrophysiology ablation procedures,"presented at the 31st Annual International IEEE EMBS Conference, Minneapolis, MN, USA, Sept. 26, 2009.

H. J. Lee, K. K. Park, P. Cristman, Ö. Oralkan, M. Kupnik, and B. T. KhuriYakub, "A lownoise oscillator based on a multimembrane CMUT for high sensitivity resonant chemical sensors,"Proc. 22th IEEE MEMS Conference, Sorrento, Italy, pp. 761764, 2009.

S. H. Wong, M. Kupnik, K. B. Pauly, and B. T. KhuriYakub, "Capacitive micromachined ultrasonic transducer (CMUT) for MRguided noninvasive therapeutic ultrasound applications,"Proc. SolidState Sensors, Actuators and Microsystems Conference, pp. 354  357, 2009.

A. Nikoozadeh, I. O. Wygant, D.S. Lin, Ö. Oralkan, K. Thomenius, A. Dentinger, D. Wildes, G. Akopyan, K. Shivkumar, A. Mahajan, D. N. Stephens, M. O’ Donnell, D. Sahn, and P. T. KhuriYakub, , "Intracardiac forwardlooking ultrasound imaging catheters using capacitive micromachined ultrasonic transducers,,"Acoust. Imag., vol. 30, 2009.

A. De La Zerda, Z. Liu, C. Zavaleta, S. Bodapati, R. Teed, S. Vaithilingam, T.J. Ma, O. Oralkan, X. Chen, B. T. KhuriYakub, H. Dai, and S. S. Gambhir, "Enhanced sensitivity carbon nanotubes as targeted photoacoustic molecular imaging agents ,"Proc. SPIE, vol. 7177, 2009.

A. De La Zerda, C. Zavaleta, S. Keren, S. Vaithilingam, S. Bodapati, R. Teed, Z. Liu, J. Levi, B. R. Smith, T.J. Ma, O. Oralkan, Z. Cheng, X. Chen, B. T. KhuriYakub, H. Dai, and S. S. Gambhir, "Photoacoustic molecular imaging using single walled carbon nanotubes in living mice ,"Proc. SPIE, vol. 7177, 2009.

S. Vaithilingam, T.J. Ma, Y. Furukawa, I. O. Wygant, X. Zhuang, A. de la Zerda, Ö. Oralkan, A. Kamaya, S. S. Gambhir, R. B. Jeffrey Jr., and B.T. KhuriYakub, , "Threedimensional photoacoustic imaging using a twodimensional CMUT array,,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 56, no. 11, pp. 241119, , Nov. 2009.

I. O. Wygant, N. S. Jamal, H. J. Lee, A. Nikoozadeh, Ö. Oralkan, M. Karaman, and B. T. KhuriYakub, , "An integrated circuit with transmit beamforming flipchip bonded to a 2D CMUT array for 3D ultrasound imaging,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 56, no. 10, pp. 214556, , Oct. 2009.

M. Karaman, I. O. Wygant, Ö. Oralkan, and B. T. KhuriYakub, "Minimally redundant 2D array designs for 3D medical ultrasound imaging ,"Medical Imaging, IEEE Transactions on , vol. 28, no. 7, pp. 10511061, Jul. 2009.

B. T. KhuriYakub, Ö. Oralkan, and M. Kupnik, "Nextgen ultrasound ,"IEEE Spectrum, vol. 46, no. 5, pp. 4454, May 2009.

D. N. Stephens, M. O'Donnell, K. Thomenius, A. Dentinger, D. Wildes, P. Chen, K. K. Shung, J. Cannata, P. KhuriYakub, Ö. Oralkan, A. Mahajan, K. Shivkumar, and D. J. Sahn, "Experimental studies with a 9F forwardlooking intracardiac imaging and ablation catheter ,"Journal of Ultrasound in Medicine, vol. 28, no. 2, pp. 207215, Feb. 2009.

I. O. Wygant, M. Kupnik, J. C. Windsor, W. M. Wright, M. S. Wochner, G. G. Yaralioglu, M. F. Hamilton, and B. T. KhuriYakub, "50 kHz Capacitive micromachined ultrasonic transducers for generation of highly directional sound with parametric arrays,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 56, no. 1, pp. 193203, Jan. 2009.
2008

M. Kupnik, I. O. Wygant, and B. T. KhuriYakub, "Finite element analysis of stress stiffening effects in CMUTs,"in Proc. IEEE Ultrason. Symp., Beijing, China, pp. 487490, 2008.

H. J. Lee, K. K. Park, P. Cristman, Ö. Oralkan, M. Kupnik and, B. T. KhuriYakub, "The effect of parallelism of CMUT cells on phase noise for chem./bio sensor applications,"in Proc. IEEE Ultrason. Symp., Beijing, China, pp. 19511954, 2008.

K. K. Park, H. J. Lee, P. Cristman, M. Kupnik, Ö. Oralkan, and B. T. KhuriYakub, "Optimum design of circular CMUT membranes for high quality factor in air,"in Proc. IEEE Ultrason. Symp., Beijing, China, pp. 504507, 2008.

K. K. Park, H. J. Lee, M. Kupnik, Ö. Oralkan, and B. T. KhuriYakub, "Capacitive micromachined ultrasonic transducer as a chemical sensor,"in Proc. IEEE Sensors, Salento, Italy, pp. 0508, 2008.

S. Vaithilingam, T.J. Ma, Y. Furukawa, O. Oralkan, A. Kamaya, K. Torashima, M. Kupnik, I. O. Wygant, X. Zhuang, R. B. Jeffrey Jr, and B. T. KhuriYakub, "Investigating large 2D arrays for photoacoustic and acoustic imaging using CMUT technology ,"in Proc. IEEE Ultrason. Symp., Beijing, China, pp. 12381241, 2008.

S. H. Wong, M. Kupnik, B. T. KhuriYakub, R. D. Watkins, and K. B. Pauly, "Progress in CMUTs for HIFU ablation of upper abdominal cancer,"in Proc. IEEE Ultrason. Symp., Beijing, China, pp. 20682071, 2008.

I. O. Wygant, M. Kupnik, and B. T. KhuriYakub, "Analytically calculating membrane displacement and the equivalent circuit model of a circular CMUT cell ,"in Proc. IEEE Ultrason. Symp., Beijing, China, pp. 21112114, 2008.

I. O. Wygant, M. Kupnik, B. T. KhuriYakub, M. S. Wochner, W. M. Wright, and M. F. Hamilton, "The design and characterization of capacitive micromachined ultrasonic transducers (CMUTs) for generating highintensity ultrasound for transmission of directional audio ,"in Proc. IEEE Ultrason. Symp., Beijing, China, pp. 21002102, 2008.

S. H. Wong, R. D. Watkins, M. Kupnik, K. B. Pauly and B. T. KhuriYakub, "Progress in development of HIFU CMUTs for use under MRguidance ,"in AIP Conference Proceedings, 8th International Symposium on Therapeutic Ultrasound, Minneapolis, MN,, vol. 1113, p. 32731, 2008.

H. J. Lee, K. K. Park, Ö. Oralkan, M. Kupnik, and B. T. KhuriYakub, "CMUT as a chemical sensor for DMMP Detection,"in Proc. IEEE Intern. Frequ. Contr. Symp., Honolulu, Hawaii, pp. 434439, 2008.

K. K. Park, H. J. Lee, M. Kupnik, Ö. Oralkan, and B. T. KhuriYakub, "Fabricating capacitive micromachined ultrasonic transducers with direct waferbonding and LOCOS technology,"Proc. 21th IEEE MEMS Conference, Tucson, USA, pp. 339342, 2008.

A. Nikoozadeh, I. O. Wygant, D. Lin, Ö. Oralkan, A. S. Ergun, D. N. Stephens, K. E. Thomenius, A. M. Dentinger, D. Wildes, G. Akopyan, K. Shivkumar, A. Mahajan, D. J. Sahn, and B. T. KhuriYakub, "Forwardlooking intracardiac ultrasound imaging using a 1D CMUT array integrated with custom frontend electronics,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 55, no. 12, pp. 26512660, Dec. 2008.

A. de la Zerda, C. Zavaleta, S. Keren, S. Vaithilingam, S. Bodapati, Z. Liu, J. Levi, B. R. Smith, T.J. Ma, O. Oralkan, Z. Cheng, X. Chen, H. Dai, B. T. KhuriYakub, and S. S. Gambhir, "Carbon nanotubes as photoacoustic molecular imaging agents in living mice,"Nature Nanotechnology, vol. 3, pp. 557562, Sep. 2008.

S. H. Wong, M. Kupnik, X. Zhuang, D.S. Lin, K. B. Pauly, and B. T. KhuriYakub, "Evaluation of Wafer Bonded CMUTs with Rectangular Membranes Featuring High Fill Factor,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 55, no. 9, pp. 20532065, Sep. 2008.

D. N. Stephens, J. Cannata, R. Liu, J. Zhao, K. K. Shung, H. Nguyen, R. Chia, A. Dentinger, D. Wildes, K. E. Thomenius, A. Mahajan, K. Shivkumar, K. Kim, M. O’Donnell, A. Nikoozadeh, Ö. Oralkan, P. T. KhuriYakub, and David Sahn, "Multifunctional catheters combining intracardiac ultrasound imaging and electrophysiology sensing,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 55, no. 7, pp. 15701581, Jul. 2008.

X. Zhuang, D. S. Lin, Ö. Oralkan, and B. T. KhuriYakub, "Fabrication of flexible transducer arrays with throughwafer electrical interconnects based on trench refilling with PDMS,"Microelectromechanical Systems, Journal of, vol. 17, no. 2, pp. 446452, May 2008.

S. H. Wong, R. D. Watkins, M. Kupnik, K. B. Pauly, and B. T. KhuriYakub, "Feasibility of MRTemperature Mapping of Ultrasonic Heating from a CMUT,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 55, no. 4, pp. 811818, April 2008.

I. Wygant, X. Zhuang, D. Yeh, Ö. Oralkan, A. S. Ergun, M. Karaman, and B. T. KhuriYakub, "Integration of 2D CMUT arrays with frontend electronics for volumetric ultrasound imaging,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 55, no. 2, pp. 327342, Feb. 2008.

Y. Huang, X. Zhang, E. O. Haeggstrom, A. S. Ergun, C.H. Cheng, and B. T. KhuriYakub, "Capacitive micromachined ultrasonic transducers (CMUTs) with isoloation posts,"Ultrasonics, vol. 48, pp. 7481, Mar. 2008.

B. T. KhuriYakub, Ö. Oralkan, and M. Kupnik, "Micromachined Ultrasonic Transducers," In McGrawHill Yearbook of Science&Technology, pp. 207210, ISBN: 9780071548342, 2008.
2007

M. Kupnik, A. S. Ergun, Y. Huang, and B. T. KhuriYakub, "Extended insulation layer structure for CMUTs,"in Proc. IEEE Ultrason. Symp., New York, USA, pp. 511514, 2007.

D. S. Lin, X. Zhuang, S. H. Wong, A. S. Ergun, M. Kupnik, and B. T. KhuriYakub, "Characterization of fabrication related gapheight variations in capacitive micromachined ultrasonic transducers,"in Proc. IEEE Ultrason. Symp., New York, USA, pp. 523526, 2007.

A. Nikoozadeh, I. O. Wygant , D.S. Lin, Ö. Oralkan, A. S. Ergun, K. Thomenius, A. Dentinger, D. Wildes, G. Akopyan, K. Shivkumar, A. Mahajan, D. N. Stephens, D. Sahn, and B. T. KhuriYakub, "Fully integrated CMUTbased forwardlooking intracardiac imaging for electrophysiology,"in Proc. IEEE Ultrason. Symp., New York, USA, pp. 900903, 2007.

S. Vaithilingam, T. J. Ma, Y. Furukawa, A. Zerda, Ö. Oralkan, A. Kamaya, S. Keren, S. S. Gambhir, R. B. Jeffrey Jr, and B. T. KhuriYakub, "A coaxial scanning acoustic and photoacoustic microscope,"in Proc. IEEE Ultrason. Symp., New York, USA, pp. 24132416, 2007.

S. H. Wong, M. Kupnik, K. B. Pauly, and B. T. KhuriYakub, "Advantages of capacitive micromachined ultrasonics transducers (CMUTs) for high intensity focused ultrasound (HIFU),"in Proc. IEEE Ultrason. Symp., New York, USA, pp. 13131316, 2007.

I. O. Wygant, M. Kupnik, J. C. Windsor, W. M. Wright, G. Yaralioglu, M. S. Wochner, M. F. Hamilton, and B. T. KhuriYakub, "50kHz capacitive micromachined ultrasonic transducers for generating highly directional sound with parametric arrays,"in Proc. IEEE Ultrason. Symp., New York, USA, pp. 519522, 2007.

I. Wygant, N. S. Jamal, H. J. Lee, A. Nikoozadeh, X. Zhuang, O. Oralkan, A. S. Ergun, M. Karaman, and B. T. KhuriYakub, "An integrated circuit with transmit beamforming and parallel receive channels for 3D ultrasound imaging: Testing and characterization,"in Proc. IEEE Ultrason. Symp., New York, USA, pp. 2528, 2007.

X. Zhuang, I. O. Wygant, D. S. Lin, M. Kupnik, Ö. Oralkan, and B. T. KhuriYakub, "Trenchisolated CMUT arrays with a supporting frame: Characterization and imaging results,"in Proc. IEEE Ultrason. Symp., New York, USA, pp. 507510, 2007.

M. Kupnik, E. Krasser, and M. Gröschl, "Absolute transit time detection for ultrasonic gas flowmeters based on time and phase domain characteristics,"in Proc. IEEE Ultrason. Symp., New York, USA, pp. 142145, 2007.

A. de la Zerda, S. Keren, S. Vaithilingam, Ö. Oralkan, B. T. KhuriYakub, and S. S. Gambhir, "A new simulation tool for photoacoustic molecular imaging validated with an experimental imaging system,"presented at the Joint Molecular Imaging Conference, Providence, RI, Sep. 811, 2007.

S. Keren, A. de la Zerda, J. Levi, S. Vaithilingam, Ö. Oralkan, B. T. KhuriYakub, and S. S. Gambhir, "Photoacoustic tomography with high resolution small animal ultrasound system,"presented at the Joint Molecular Imaging Conference, Providence, RI, Sep. 811, 2007.

S. H. Wong, A. Ergun, G. G. Yaralioglu, Ö. Oralkan, M. Kupnik, R. K. Butts, and B. T. KhuriYakub, "Design of HIFU CMUT Arrays for Treatment of Liver and Renal Cancer,"in AIP Conference Proceedings, Therapeutic Ultrasound: 6th International Symposium on Therapeutic Ultrasound, vol. 911, pp. 5460, May, 2007.

X. Zhuang, D.S. Lin, O. Oralkan, and B. T. KhuriYakub, "Flexible CMUT Arrays with ThroughWafer Electrical Interconnects Based on Trench Refilling with PDMS,"8th Annual Ultrasonic Transducer Engineering Conference, Los Angeles, CA , to appear, Apr., 2007.

K. K. Park, H. J. Lee, G. Yaralioglu, O. Oralkan, M. Kupnik, and B. T. KhuriYakub, "Capacitive micromachined ultrasonic transducers for chemical detection in air,"Microsystems Technology Symposium, San Jose, CA , to appear, Mar., 2007.

X. Zhuang, D. Lin, Ö. Oralkan, B. T. KhuriYakub, "Flexible transducer arrays with throughwafer electrical interconnects based on trench refilling with PDMS,"Proc. 20th IEEE MEMS Conference, Kobe, Japan, pp. 7376, Jan., 2007.

K. K. Park, H. J. Lee, G. G. Yaralioglu, Ö. Oralkan, M. Kupnik, C. F. Quate, B. T. KhuriYakub, T. Braun, H. P. Lang, M. Hegner, C. Gerber, and J. Gimzewski, "Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen,"Applied Physics Letters, Lett. 91, 094102, 2007.

X. Zhuang, A. S. Ergun, Y. Huang, I. O. Wygant, O. Oralkan, and B. T. KhuriYakub, "Integration of trenchisolated throughwafer interconnects with 2D capacitive micromachined ultrasonic transducer arrays,"Sensors and Actuators A: Physical, vol. 138, pp.221229, July 2007.

X. Zhuang, A. Nikoozadeh, M. A. Beasley, G. G. Yaralioglu, B. T. KhuriYakub and B. L. Pruitt, "Biocompatible coatings for CMUTs in a harsh, aqueous environment,"Jounal of Micromechanics and Microengineering, vol.17, pp. 994 1001, 2007.

B. Bayram, M. Kupnik, G. G. Yaralioglu, Ö. Oralkan, A. S. Ergun, D. Lin, S. H. Wong, and B. T. KhuriYakub, "Finite element modeling and experimental characterization of crosstalk in 1D CMUT arrays,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 54, no. 2, pp. 418 430, Feb. 2007.

X. Zhuang, D. S. Lin, Ö. Oralkan, and B. T. KhuriYakub, "Fabrication of flexible transducer arrays with throughwafer electrical interconnects based on trench refilling with PDMS,"Microelectromechanical Systems, Journal of, vol. 17, no. 2, pp. 446452, May 2008.

S. H. Wong, R. D. Watkins, M. Kupnik, K. B. Pauly, and B. T. KhuriYakub, "Feasibility of MRTemperature Mapping of Ultrasonic Heating from a CMUT,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 55, no. 4, pp. 811818, April 2008.

I. Wygant, X. Zhuang, D. Yeh, Ö. Oralkan, A. S. Ergun, M. Karaman, and B. T. KhuriYakub, "Integration of 2D CMUT arrays with frontend electronics for volumetric ultrasound imaging,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 55, no. 2, pp. 327342, Feb. 2008.

Y. Huang, X. Zhang, E. O. Haeggstrom, A. S. Ergun, C.H. Cheng, and B. T. KhuriYakub, "Capacitive micromachined ultrasonic transducers (CMUTs) with isoloation posts,"Ultrasonics, vol. 48, pp. 7481, Mar. 2008.

B. T. KhuriYakub, K. K. Park, H. J. Lee, G. Yaralioglu, A. S. Ergun, Ö. Oralkan, M. Kupnik, C. F. Quate, T. Braun, H. Lang, M. Hegner, J. Ramseyer, C. Gerber, and J. Gimzewski , "The capactive micromachined ultrasonic transducer (CMUT) as a chem/bio sensor,"in Proc. IEEE Ultrason. Symp., pp. 472475, 2007.

M. Kupnik, I. Wygant, S. H. Wong, Y. Huang, B. T. KhuriYakub, "CMUTbased applications for gaseous media,"International Congress on Ultrasonics, Vienna, Austria , , Apr., 2007.

B. T. KhuriYakub, "Highfrequency ultrasound imaging using capacitive micromachined ultrasonic transducers,"AIUM Annual Convention, New York, NY , , Mar., 2006.

B. T. KhuriYakub, S. Ergun, Ö. Oralkan, and G. G. Yaralioglu, "Capacitive ultrasonic transduction," Comprehensive Microsystems Fundamentals, Technology and Applications, Yogesh Gianchandani, Osamu Tabata, Hans Zappe (Ed.) Oxford, England: Elsevier, in print, 2007.
2006

S. Vaithilingam, I. O. Wygant, S. Sifferman, X. Zhuang, Y. Furukawa, Ö. Oralkan, S. Keren, S. S. Gambhir and B. T. KhuriYakub, "Tomographic photoacoustic imaging using capacitive micromachined ultrasonic transducer (CMUT) technology,"in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 397400, 2006.

S. H. Wong, A. Ergun, G. G. Yaralioglu, Ö. Oralkan, E. Liu, M. Kupnik, R. K. Butts, and B. T. KhuriYakub, "Capacitive micromachined ultrasonic transducers for high intensity focused ablation of upper abdominal tumors,"in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 841844, 2006.

X. Zhuang, A. S. Ergun, Ö. Oralkan, and B. T. KhuriYakub, "Trench isolated CMUT arrays with a supporting frame,"in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 19551958, 2006.

G. G. Yaralioglu, B. Bayram, and B. T. KhuriYakub, "Finite Element Analysis of CMUTS: Conventional vs. Collapse Operation Modes,"in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 586589, 2006.

B. Bayram, G. G. Yaralioglu, M. Kupnik, and B. T. KhuriYakub, "Acoustic Crosstalk Reduction Method for CMUT Arrays,"in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 590593, 2006.

M. Kupnik, A. S. Ergun, G. G. Yaralioglu, B. Bayram, S. H. Wong, D. S. Lin, Ö. Oralkan, and B. T. KhuriYakub, "Finite element analysis of fabrication related thermal effects in capacitive micromachined ultrasonic transducers,"in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 938941, 2006.

M. Kupnik, A. Schröder, and M. Gröschl, "Adaptive Asymmetric DoublePath Ultrasonic TransitTime Gas Flowmeter,"in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 24292432, 2006.

I. O. Wygant, H. J. Lee, A. Nikoozadeh, Ö. Oralkan, M. Karaman, and B. T. KhuriYakub, "An integrated circuit with transmit beamforming and parallel receive channels for realtime threedimensional ultrasound imaging,"in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 21862189, 2006.

I. Wygant, M. Karaman, Ö. Oralkan, and B. T. KhuriYakub, "Volumetric imaging using fanbeam scanning with reduced redundancy 2D arrays,"in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 21902193, 2006.

D. N. Stephens, J. Cannata, R. Liu, K. K. Shung, Ö. Oralkan, A. Nikoozadeh, B. T. KhuriYakub, H. Nguyen, R. Chia, A. Dentinger, D. Wildes, K. Kim, M. O’Donnell, and D. Sahn, "Forward looking intracardiac imaging catheters for electrophysiology,"in Proc. IEEE Ultrason. Symp., Vancouver, Canada, pp. 702705, 2006.

S.H. Wong, I.O. Wygant, D.T. Yeh, X. Zhuang, B. Bayram, M. Kupnik, O.Oralkan, A.S. Ergun, G.G. Yaralioglu, and B.T. KhuriYakub, "Capacitive Micromachined Ultrasonic Transducer Arrays for Integrated Diagnostic/Therapeutic Catheters,"in AIP Conference Proceedings, Therapeutic Ultrasound: 5th International Symposium on Therapeutic Ultrasound, vol. 829, no. 1, pp. 395399, May, 2006.

I.O. Wygant, Mustafa Karaman, O. Oralkan, and B.T. KhuriYakub, "Beamforming and Hardware Design for a Multichannel Frontend Iintegrated Circuit for Realtime 3D Catheterbased Ultrasonic Imaging,"in Proceedings of SPIE Med. Imag. Conf., vol. 6147, pp.18, Mar. 2006.

X. Zhuang, A.S. Ergun, O. Oralkan, I.O. Wygant, and B.T. KhuriYakub, "Interconnection and Packaging for 2D Capacitive Micromachined Ultrasonic Transducer Arrays Based on ThroughWafer Trench Isolation,"in Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on, pp. 270 273, Jan. 2006.

S.H. Wong, G.C. Scott, S.M. Conolly, G. Narayan, D. H. Liang, "Feasibility of noncontact intracardiac ultrasound ablation and imaging catheter for treatment of atrial fibrillation,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 53, no. 2, pp. 23942405 , Dec. 2006.

Y.L. Huang, E. Haeggstrom, B. Bayram,X.F. Zhuang, A. S. Ergun, C.H. Cheng, B. T. KhuriYakub, "Comparison of conventional and collapsed region operation of capacitive micromachined ultrasonic transducers,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 53, no. 10, pp. 1918 1932, Oct. 2006.

O. Oralkan, B. Bayram, G.G. Yaralioglu, A.S. Ergun, M. Kupnik, D.T. Yeh, I.O. Wygant and B.T. KhuriYakub, "Experimental characterization of collapsemode CMUT operation,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 53, no. 8, pp. 1513 1523, Aug. 2006.

M. Kupnik, A. Schroder, P. O'Leary, E. Benes, and M. Groeschl, "Adaptive pulse repetition frequency technique for an ultrasonic transittime gas flowmeter for hot pulsating gases,"Sensors Journal, IEEE, vol. 6, no. 4, pp. 906 915, Aug. 2006.

S. Vaithilingam, I. O. Wygant, P. S. Kuo, X. Zhuang, Ö. Oralkan, P. D. Olcott, and B. T. KhuriYakub, "Capacitive micromachined ultrasonic transducers (CMUTs) for photoacoustic imaging,"in Proc. SPIE Photons Plus Ultrasound: Imaging and Sensing 2005: The Sixth Conference on Biomedical Thermoacoustics, Optoacoustics, and Acoustooptics, vol. 6086, pp. 111, 2006.

A.F.W. van der Steen, R.A. Baldewsing, F.L. Degertekin, S. Emelianov, M.E. Frijlink, Y. Furukawa, D. Goertz, M. Karaman, B.T. KhuriYakub, K. Kim, F. Mastik, T. Moriya, Ö. Oralkan, Y. Saijo, J.A Schaar, P.W. Serruys, S. Sethuraman, A. Tanaka, H.J. Vos, R. Witte, M. O'Donnell, "IVUS beyond the horizon,"EuroIntervention, vol. 2, no. 1, pp. 132142, May 2006 .
2005

I.O. Wygant, D.T. Yeh, X. Zhuang, A. Nikoozadeh, O.Oralkan, A.S. Ergun, M. Karaman, and B.T. KhuriYakub, "A Miniature Realtime Volumetric Ultrasound Imaging System,"in Proceedings of SPIE, Medical Imaging 2005: Ultrasonic Imaging and Signal Processing, William F. Walker, Stanislav Y. Emelianov, Editors, vol. 5750, pp. 2636, Apr. 2005.

X. Zhuang, I.O. Wygant, D.T. Yeh, A. Nikoozadeh, O.Oralkan, A.S. Ergun, C.H. Cheng, Y. Huang, G.G. Yaralioglu, and B.T. KhuriYakub, "Twodimensional capacitive micromachined ultrasonic transducer (cMUT) arrays for a miniature integrated volumetric ultrasonic imaging system,"in Proceedings of SPIE, Medical Imaging 2005: Ultrasonic Imaging and Signal Processing, William F. Walker, Stanislav Y. Emelianov, Editors, vol. 5750, pp. 3746, Apr. 2005.

G.G. Yaralioglu, B. Bayram, A. Nikoozadeh, and B.T. P. KhuriYakub, "Finite element modeling of capacitive micromachined ultrasonic transducers,"in Proceedings of SPIE, Medical Imaging 2005: Ultrasonic Imaging and Signal Processing, William F. Walker, Stanislav Y. Emelianov, Editors, vol. 5750, pp. 7786, Apr. 2005.

D.T. Yeh, O.Oralkan, A.S. Ergun, X. Zhuang, I.O. Wygant, and B.T. KhuriYakub, "Highfrequency cMUT arrays for highresolution medical imaging,"in Proceedings of SPIE, Medical Imaging 2005: Ultrasonic Imaging and Signal Processing, William F. Walker, Stanislav Y. Emelianov, Editors, vol. 5750, pp. 8798, Apr. 2005.

I.O. Wygant, D.T. Yeh, X. Zhuang, S. Vaithilingam, A. Nikoozadeh, O. Oralkan, A.S. Ergun, G.G. Yaralioglu, and B.T. KhuriYakub, "Integrated ultrasound imaging systems based on capacitive micromachined ultrasonic transducer arrays,"Proc. IEEE Sensors, pp. 4 pp. 30, Nov. 2005.

I.O. Wygant, X. Zhuang, P.S. Kuo, D.T. Yeh, O. Oralkan, and B.T. KhuriYakub, "Photoacoustic imaging using a twodimensional cMUT array,"in Proc. IEEE Ultrason. Symp., Rotterdam, Netherlands, vol.4, pp. 1921 1924, Sept. 2005.

I.O. Wygant, X. Zhuang, D.T. Yeh, S. Vaithilingam, A. Nikoozadeh, O. Oralkan, A.S. Ergun, M. Karaman, and B.T. KhuriYakub, "An endoscopic imaging system based on a twodimensional cMUT array: realtime imaging results,"in Proc. IEEE Ultrason. Symp., Rotterdam, Netherlands, vol.2, pp. 792 795, Sept. 2005.

D.T. Yeh, O. Oralkan, I.O. Wygant, M. O'Donnell, and B.T. KhuriYakub, "3D ultrasound imaging using forward viewing cMUT ring arrays for intravascular and intracardiac applications,"in Ultrasonics Symposium, 2005 IEEE, vol.2, pp. 783 786, Sept. 2005.

D.T. Yeh, O. Oralkan, I.O. Wygant, A.S. Ergun, J.H. Wong, and B.T. KhuriYakub, "Highresolution imaging with highfrequency 1D linear cMUT arrays,"in Proc. IEEE Ultrason. Symp., Rotterdam, Netherlands, vol.1, pp. 665 668, Sept. 2005.

B. Bayram, M. Kupnik, G.G. Yaralioglu, O. Oralkan, D. Lin, X. Zhuang, A.S. Ergun, A.F. Sarioglu, S.H. Wong, and B.T. KhuriYakub, "Characterization of crosscoupling in capacitive micromachined ultrasonic transducers,"in Proc. IEEE Ultrason. Symp., Rotterdam, Netherlands, vol.1, pp. 601 604, Sept. 2005.

S.H. Wong, G.C. Scott, S.M. Conolly, G. Narayan, D.H. Liang, "Intravascular Ultrasound Array For Treatment of Atrial Fibrillation,"in Proc. IEEE Ultrason. Symp., Rotterdam, Netherlands, vol.1, pp. 1751 1754, Sept. 2005.

Y. Huang, E.O. Haggstrom, X. Zhuang, A.S. Ergun, and B.T. KhuriYakub, "Capacitive micromachined ultrasonic transducers (cMUTs) with pistonshaped membranes,"in Proc. IEEE Ultrason. Symp., Rotterdam, Netherlands, vol.1, pp. 589 592, Sept. 2005.

R. Fisher, K. Thomenius, R. Wodnicki, R. Thomas, S. Cogan, C. Hazard, W. Lee, D. Mills, B.T. KhuriYakub, A.S. Ergun, and G.G. Yaralioglu, "Reconfigurable arrays for portable ultrasound,"in Proc. IEEE Ultrason. Symp., Rotterdam, Netherlands, vol.1, pp. 495 499, Sept. 2005.

X. Zhuang, A.S. Ergun, O. Oralkan, Y. Huang, I.O. Wygant, G.G. Yaralioglu, D.T. Yeh, and B.T. KhuriYakub, "Throughwafer trenchisolated electrical interconnects for cMUT arrays,"in Proc. IEEE Ultrason. Symp., Rotterdam, Netherlands, vol.1, no.pp. 475 478, 1821 Sept. 2005.

A.S. Ergun, X. Zhuang, Y. Huang, O. Oralkan, G.G. Yaralioglu, and B.T. KhuriYakub, "Capacitive micromachined ultrasonic transducer technology for medical ultrasound imaging,"in Proceedings of SPIE, Medical Imaging 2005: Ultrasonic Imaging and Signal Processing, William F. Walker, Stanislav Y. Emelianov, Editors, vol. 5750, pp. 5868, April 2005.

A.S. Ergun, Y. Huang, X. Zhuang, O. Oralkan, G.G. Yarahoglu, and B.T. KhuriYakub, "Capacitive micromachined ultrasonic transducers: fabrication technology,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 52, no. 12, pp. 2242 2258, Dec. 2005.

G.G. Yaralioglu, S.A. Ergun, and B.T. KhuriYakub, "Finiteelement analysis of capacitive micromachined ultrasonic transducers,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 52, no. 12, pp. 2185 2198, Dec. 2005.

B. Bayram, G.G. Yaralioglu, M. Kupnik, A.S. Ergun, O. Oralkan, A. Nikoozadeh, and B.T. KhuriYakub, "Dynamic analysis of capacitive micromachined ultrasonic transducers,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 52, no. 12, pp. 2270 2275, Dec. 2005.

B.T. KhuriYakub, "Introduction to the special issue on micromachined ultrasonic transducers,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 52, no. 12, pp. 2162 2162, Dec. 2005.

U. Demirci, G.G. Yaralioglu, E. Haeggstrom, and B.T. KhuriYakub, "Femtoliter to picoliter droplet generation for organic polymer deposition using single reservoir ejector arrays,"Semiconductor Manufacturing, IEEE Transactions on, vol. 18, no. 4, pp. 709 715, Nov. 2005.

F. Bellan, A. Bulletti, L. Capinieri, L. Masotti, G.G. Yaralioglu, F.L. Degertekin, B.T. KhuriYakub, F. Guasti, and E. Rosi, "A new design and manufacturing process for embedded lambwave interdigital transducers based on piezopolymer film,"Sensors and Actuators, A : Physical, vol. 123  124, pp. 379  387, Sep. 23, 2005.

T.C. Marentis, B. Kusler, G.G.Yaralioglu, S.J. Liu, E.O. Haeggstrom, and B.T. KhuriYakub, "Microfluidic sonicator for realtime disruption of eukaryotic cells and bacterial spores for DNA analysis,"Ultrasound in Medicine and Biology, vol. 31, no. 9, pp. 12651277, Sep. 2005.

S. Ergun, G.G. Yaralioglu, Ö. Oralkan, B.T. KhuriYakub, "Fabrication Techniques in Micromachined Capacitive Ultrasonic Transducers and Their Applications," In MEMS / NEMS Handbook, Vol. 2 : Fabrication Techniques for MEMS / NEMS, C. T. Leondes, ed. New York : Springer. ISBN : 0387245200, 2005.
2004

Y. Huang, E.O. Haeggstrom, X. Zhuang, A.S. Ergun, and B.T. KhuriYakub, "Capacitive micromachined ultrasonic transducers (cMUTs) with isolation posts,"in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.3, pp. 2223 2226, vol.3, 2327 Aug. 2004.

B. Bayram, G.G. Yaralioglu, A.S. Ergun, O. Oralkan, and B.T. KhuriYakub, "Dynamic FEM analysis of multiple cMUT cells in immersion [capacitive micromachined ultrasonic transducers],"in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.1, pp. 252 255, vol.1, 2327 Aug. 2004.

A. Nikoozadeh, B. Bayram, G.G. Yaralioglu, and B.T. KhuriYakub, "Analytical calculation of collapse voltage of cMUT membrane [capacitive micromachined ultrasonic transducers],"in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.1, pp. 256 259, vol.1, 2327 Aug. 2004.

Y. Huang, E.O. Haeggstrom, X. Zhuang, A.S. Ergun, and B.T. KhuriYakub, "Optimized membrane configuration improves cMUT performance,"in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.1, pp. 505 508, vol.1, 2327 Aug. 2004.

O. Oralkan, S.T. Hansen, B. Bayram, G.G. Yaralioglu, A.S. Ergun, and B.T. KhuriYakub, "cMUT ring arrays for forwardlooking intravascular imaging,"in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.1, pp. 403 406, vol.1, 2327 Aug. 2004.

O. Oralkan, S.T. Hansen, B. Bayram, G.G. Yaralioglu, A.S. Ergun, and B.T. KhuriYakub, "Highfrequency cMUT arrays for highresolution medical imaging,"in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.1, pp. 399 402, 2327 Aug. 2004.

I.O. Wygant, X. Zhuang, D.T. Yeh, A. Nikoozadeh, O. Oralkan, A.S. Ergun, M. Karaman, and B.T. KhuriYakub, "Integrated ultrasonic imaging systems based on cMUT arrays: recent progress,"in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.1, pp. 391 394, 2327 Aug. 2004.

U. Demirci, G.G. Yaralioglu, E. Haeggstrom, G. Percin, S. Ergun, and B.T. KhuriYakub, "Acoustically actuated flextensional Si/sub x/N/sub y/ and singlecrystal silicon 2D micromachined ejector arrays,"Semiconductor Manufacturing, IEEE Transactions on, vol. 17, no. 4, pp. 517 524, Nov. 2004.

S.T. Hansen, A.S. Ergun, W.Liou, B.A. Auld, and B.T. KhuriYakub, "Wideband micromachined capacitive microphones with radio freq. detection,"J. Acst. Soc. Am., vol. 116 (2), Aug. 2004.

G.G. Yaralioglu, I.O. Wygant, T.C. Marentis, and B.T. KhuriYakub, "Ultrasonic mixing in microfluidic channels using integrated transducers,"Anal. Chem.; (article), 76 (13); 36943698, Jul. 1, 2004.

U. Demirci, A.S. Ergun, O. Oralkan, M. Karaman, and B.T. KhuriYakub, "Forwardviewing CMUT arrays for medical imaging,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 51, no. 7, pp. 887 895, July 2004.

U. Demirci, G.G. Yaralioglu, E. Haeggstrom, and B.T. KhuriYakub, "Femtoliter to picoliter droplet generation for organic polymer deposition using single reservoir ejector arrays,"Semiconductor Manufacturing, IEEE Transactions on, vol. 18, no. 4, pp. 709 715, Nov. 2005.

F. Bellan, A. Bulletti, L. Capinieri, L. Masotti, G.G. Yaralioglu, F.L. Degertekin, B.T. KhuriYakub, F. Guasti, and E. Rosi, "A new design and manufacturing process for embedded lambwave interdigital transducers based on piezopolymer film,"Sensors and Actuators, A : Physical, vol. 123  124, pp. 379  387, Sep. 23, 2005.

T.C. Marentis, B. Kusler, G.G.Yaralioglu, S.J. Liu, E.O. Haeggstrom, and B.T. KhuriYakub, "Microfluidic sonicator for realtime disruption of eukaryotic cells and bacterial spores for DNA analysis,"Ultrasound in Medicine and Biology, vol. 31, no. 9, pp. 12651277, Sep. 2005.

Y. Huang, E.O. Haeggstrom, X. Zhuang, A.S. Ergun, and B.T. KhuriYakub, "A solution to the charging problems in capacitive micromachined ultrasonic transducers,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, Vol. 52, no.4, pp. 578 580 , April 2005.

B. Bayram, O. Oralkan, A.S. Ergun, E. Haeggstrom, G.G. Yaralioglu, and B.T. KhuriYakub, "Capacitive micromachined ultrasonic transducer design for high power transmission,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 52, no. 2, pp. 326 339, Feb. 2005.

J.A. Johnson, O. Oralkan, S. Ergun, U. Demirci, M. Karaman, and B.T. KhuriYakub, "Coherent array imaging using phased subarrays. Part II: simulations and experimental results,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 52, no. 1, pp. 51 64, Jan. 2005.

J.A. Johnson, M. Karaman, and B.T. KhuriYakub, "Coherentarray imaging using phased subarrays. Part I: basic principles,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 52, no. 1, pp. 37 50, Jan. 2005.
2003

G.G. Yaralioglu, A.S. Ergun, Y. Huang, and B.T. KhuriYakub, "Capacitive micromachined ultrasonic transducers for robotic sensing applications,"in Intelligent Robots and Systems, 2003. (IROS 2003). Proceedings. 2003 IEEE/RSJ International Conference on, vol.3, pp. 2347 2352, Oct. 2003.

G.G. Yaralioglu, M.H. Badi, A.S. Ergun, and B.T. KhuriYakub, "Improved equivalent circuit and finite element method modeling of capacitive micromachined ultrasonic transducers,"in Proc. IEEE Ultrason. Symp., Honolulu, Hawaii, vol.1, pp. 469 472, 58 Oct. 2003.

J.A. Johnson, O. Oralkan, A.S. Ergun, U. Demirci, M. Karaman, and B.T. KhuriYakub, "Phased subarray imaging for lowcost, wideband coherent array imaging,"in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.2, pp. 1875 1878, 58 Oct. 2003.

M.H. Badi, G.G. Yaralioglu, A.S. Ergun, Y. Huang and B.T. KhuriYakub, "Improved modeling and fabrication techniques for capacitive micromachined ultrasonic Lamb wave transducers,"in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.1, pp. 585 588, 58 Oct. 2003.

U. Demirci, G.G. Yaralioglu, E. Haeggstrom, G. Percin, and B.T. KhuriYakub, "2D acoustically actuated micromachined droplet ejector array,"in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.2, pp. 1983 1986, 58 Oct. 2003.

B. Bayram, E. Haeggstrom, A.S. Ergun, G.G. Yaralioglu, and B.T. KhuriYakub, "Dynamic analysis of cMUTs in different regimes of operation,"in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.1, pp. 481 484, 58 Oct. 2003.

Y. Huang, E. Haeggstrom, B. Bayram, X. Zhuang, A.S. Ergun, C.H. Cheng, and B.T. KhuriYakub, "Collapsed regime operation of capacitive micromachined ultrasonic transducers based on waferbonding technique,"in Proc. IEEE Ultrason. Symp., Montreal, Canada, vol.2, pp. 1161 1164, 58 Oct. 2003.

G. Percin, G.G. Yaralioglu, and B.T. KhuriYakub, "Micromachined fluid ejector arrays for biotechnological and biomedical applications,"in Robotics and Automation, 2003. Proceedings. ICRA '03. IEEE International Conference on, vol.2, pp. 2892 2894, 1419 Sept. 2003.

U. Demirci, G.G. Yaralioglu, A.S. Ergun, G. Percin, and B.T. KhuriYakub, "Fabrication of Acoustically Actuated Flextensional Single Crystal Silicon 2D Micromachined Ejector Arrays,"TECHON 2003, Dallas, TX, , Aug. 2003.

U. Demirci, G.G. Yaralioglu, A.S. Ergun, G. Percin, and B.T. KhuriYakub, "Acoustically Actuated Flextensional 2D Micromachined Ejector Arrays,"SEMICONWEST 2003, San Francisco, CA, , Jul. 2003.

Y. Huang, A.S. Ergun, E. Haeggstrom, and B.T. KhuriYakub, "New fabrication process for Capacitive Micromachined Ultrasonic Transducers,"in Micro Electro Mechanical Systems, 2003. MEMS03 Kyoto. IEEE The Sixteenth Annual International Conference on, pp. 522 525, 1923 Jan. 2003.

H. Jagannathan, G.G. Yaralioglu, A.S. Ergun, and B.T. KhuriYakub, "An implementation of a microfluidic mixer and switch using micromachined acoustic transducers,"in Micro Electro Mechanical Systems, 2003. MEMS03 Kyoto. IEEE The Sixteenth Annual International Conference on, pp. 104 107, 1923 Jan. 2003.

H. Jagannathan, G.G. Yaralioglu, A.S. Ergun, and B.T. KhuriYakub, "Acoustic heating and thermometry in microfluidic channels,"in Micro Electro Mechanical Systems, 2003. MEMS03 Kyoto. IEEE The Sixteenth Annual International Conference on, pp. 474 477, 1923 Jan. 2003.

S.T. Hansen, A.S. Ergun, and B.T. KhuriYakub, "Wideband micromachined acoustic sensors with radio frequency detection,"in Proceedings of SPIE, Unattended Ground Sensor Technologies and Applications V, Edward M. Carapezza, Editor, vol. 5090, pp. 4250, September 2003.

H. Jagannathan, G.G. Yaralioglu, A.S. Ergun, and B.T. KhuriYakub, "Ultrasonic temperature control and measurement in microfluidic channels,"in Proceedings of SPIE, Microfluidics, BioMEMS, and Medical Microsystems, Holger Becker, Peter Woias, Editors, vol. 4982, pp. 243247, January 2003.

B.T. KhuriYakub, A.S. Ergun, Y. Huang, C.H.Cheng, O. Oralkan, J. Johnson, G.G. Yaralioglu, and M. Karaman, "Micromachined ultrasonic transducers and their use for 2D and 3D imaging,"in Acoustical Imaging , , 2003.

O. Oralkan, A.S. Ergun, C.H. Cheng, J.A. Johnson, M. Karaman, T.H. Lee, and B.T. KhuriYakub, "Volumetric ultrasound imaging using 2D CMUT arrays,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 50, no. 11, pp. 1581 1594, Nov 2003.

M.H. Badi, G.G. Yaralioglu, A.S. Ergun, S.T. Hansen, E.J. Wong, and B.T. KhuriYakub, "Capacitive micromachined ultrasonic Lamb wave transducers using rectangular membranes,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 50, no. 9, pp. 1191 1203, Sept. 2003.

B. Bayram, E. Haeggstrom, G.G. Yaralioglu, and B.T. KhuriYakub, "A new regime for operating capacitive micromachined ultrasonic transducers,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on , vol. 50, no. 9, pp. 1184 1190, Sept. 2003.

G. Percin, and B.T. KhuriYakub, "Photoresist deposition without spinning,"IEEE Trans. on Semiconductor Manufacturing, vol. 16, no. 3, pp. 452  459, Aug. 2003.

A. S. Ergun, G. G. Yaralioglu, B. T. KhuriYakub, "Capacitive Micromachined Ultrasonic Transducers : Theory and Technology,"J. of Aerospace Eng., vol. 16, pp. 76  84, Apr. 2003.

G. Perçin, G. G. Yaralioglu, B. T. KhuriYakub, "Micromachined Fluid Ejector Arrays for Biotechnological and Biomedical Applications,"2003 IEEE ICRA : International Conference on Robotics and Automation, Taipei, Taiwan, , May 12  17, 2003.
2002

K. Kaviani, B.T. KhuriYakub, O. Oralkan, and B.A. Wooley, "A multichannel, pipeline analog–to–digital converter for an integrated 3–D ultrasound imaging system,"in SolidState Circuits Conference, 2002. ESSCIRC 2002. Proceedings of the 28th European, vol., pp. 263 266, 2426 Sept. 2002.

A.S. Ergun, C.H. Cheng, U. Demirci, and B.T. KhuriYakub, "Fabrication and characterization of 1dimensional and 2dimensional Capacitive Micromachined Ultrasonic Transducer (cMUT) arrays for 2dimensional and volumetric ultrasonic imaging,"in Oceans '02 MTS/IEEE, vol.4, pp. 2361 2367, 2931 Oct. 2002.

Y. Huang, A.S. Ergun, E. Haeggstrom, and B.T. KhuriYakub, "Fabrication of Capacitive Micromachined Ultrasonic Transducers (cMUTs) using wafer bonding technology for low frequency (10 kHz150 kHz) sonar applications,"in Oceans '02 MTS/IEEE, vol.4, pp. 2322 2327, 2931 Oct. 2002.

J.A. Johnson, M. Karaman, and B.T. KhuriYakub, "Phased subarray processing for underwater 3D acoustic imaging,"in Oceans '02 MTS/IEEE, vol.4, pp. 2145 2151, 2931 Oct. 2002.

O. Oralkan, A.S. Ergun, C.H. Cheng, J.A. Johnson, M. Karaman, T.H. Lee, and B.T. KhuriYakub, "Volumetric imaging using 2D capacitive micromachined ultrasonic transducer arrays (cMUTs): initial results,"in Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE, vol.2, pp. 1083 1086, 811 Oct. 2002.

A.S. Ergun, Y. Huang, C.H. Cheng, O. Oralkan, J.A. Johnson, H. Jagannathan, U. Demirci, G.G. Yaralioglu, M. Karaman, and B.T. KhuriYakub, "Broadband capacitive micromachined ultrasonic transducers ranging from 10 kHz to 60 MHz for imaging arrays and more,"in Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE, vol.2, pp. 1039 1043, 811 Oct. 2002.

M.H. Badi, G.G. Yaralioglu, A.S. Ergun, S.T. Hansen, and B.T. KhuriYakub, "Lamb wave devices based on capacitive micromachined ultrasonic transducers,"in Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE, vol.2, pp. 1031 1034, 811 Oct. 2002.

O. Oralkan, A.S. Ergun, C.H. Cheng, J.A. Johnson, M. Karaman, and B.T. KhuriYakub, "Underwater acoustic imaging using capacitive micromachined ultrasonic transducer arrays,"in Oceans '02 MTS/IEEE, vol.4, pp. 2354 2360, 2931 Oct. 2002.

S.T. Hansen, A.S. Ergun, and B.T. KhuriYakub, "Acoustic sensing with capacitive micromachined membranes and radio frequency detection,"in Presented at the 2001 Meeting of the MSS Specialty Group on Battlefield Acoustic Ad Seismic Sensing, Magnetic and Electric Field Sensors, Johns Hopkins University, Laurel, MD, vol. 1, Oct. 23, 2002.

C.H. Cheng, A.S. Ergun, and B.T. KhuriYakub, "Electrical through silicon wafer interconnects for high frequency photodetector arrays,"in IEEE Photonic Devices and Systems Packaging Symposium, Stanford, CA, , Jul. 14  16, 2002.

C.H. Cheng, A.S. Ergun, and B.T. KhuriYakub, "Electrical through wafer interconnects with 0.05 picofarad parasitic capacitance on 400 µm thick silicon substrate,"in SolidState Sensor, Actuator, and Microsystems Workshop, Hilton Head Island, SC, , Jun. 2  6, 2002.

J.A. Johnson, M. Karaman, and B.T. KhuriYakub, "Synthetic phased array image formation and restoration,"in Acoustics, Speech, and Signal Processing, 2002. Proceedings. (ICASSP '02). IEEE International Conference on, vol.3, pp. 2885 2888, 1317 May. 2002.

J.A. Johnson, M. Karaman, and B.T. KhuriYakub, "Image formation and restoration using multielement synthetic array processing,"in Medical Imaging 2002 : Ultrasonic Imaging and Signal Processing, Proc. SPIE, San Diego, CA, vol. 4687, pp. 37  46, Feb. 23  28, 2002.

E. Haeggstrom, G.G. Yaralioglu, A.S. Ergun, and B.T. KhuriYakub, "Capacitive micromachined ultrasonic transducer based integrated actuator for atomic force microscope cantilevers,"in Nanotechnology, 2002. IEEENANO 2002. Proceedings of the 2002 2nd IEEE Conference on, pp. 45 49, 2002.

G. Percin, G.G. Yaralioglu, and B.T. KhuriYakub, "Micromachined droplet ejector arrays,"Rev. Sci. Instrum.; in Virtual Journal of Nanoscale Science & Technology, vol. 73, no. 12, pp. 4385  4389; vol. 6, no. 23, Dec. 2002; Dec. 2, 2002.

O. Oralkan, A.S. Ergun, J.A. Johnson, M. Karaman, U. Demirci, K. Kaviani, T.H. Lee, and B.T. KhuriYakub, "Capacitive micromachined ultrasonic transducers: nextgeneration arrays for acoustic imaging?,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 49, no. 11, pp. 1596 1610, Nov 2002.

G. Percin, and B.T. KhuriYakub, "Piezoelectrically actuated flextensional micromachined ultrasound transducers. I. Theory,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 49, no. 5, pp.573584, May 2002.

G. Percin, and B.T. KhuriYakub, "Piezoelectrically actuated flextensional micromachined ultrasound droplet ejectors,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.49, no.6, pp.756766, Jun 2002.

G. Percin, and B.T. KhuriYakub, "Piezoelectrically actuated flextensional micromachined ultrasound transducers. II. Fabrication and experiments,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.49, no.5, pp.585595, May 2002.

G. Percin, and B.T. KhuriYakub, "Micromachined droplet ejector arrays for controlled inkjet printing and deposition,"Rev. Sci. Instrum., also in Virtual Journal of Nanoscale Science & Technology, vol. 5, vol. 73, pp. 2193  2196, May 6, 2002.

J.A. Johnson, O Oralkan, U. Demirci, S. Ergun, M. Karaman, and B.T. KhuriYakub, "Medical imaging using capacitive micromachined ultrasonic transducerarrays,"Ultrasonics, vol. 40, pp. 471  476, May 2002.

Y. Roh, and B.T. KhuriYakub, "Finite element analysis of underwater capacitor micromachined ultrasonic transducers,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on , vol.49, no.3, pp.293298, Mar 2002.

G. Percin, and B.T. KhuriYakub, "Piezoelectrically actuated flextensional micromachined ultrasonic transducers,"Ultrasonics, vol. 40, pp. 441  448, Feb. 2002.
2001

H. Jagannathan, G.G. Yaralioglu, A.S. Ergun, F.L. Degertekin, and B.T. KhuriYakub, "Microfluidic channels with integrated ultrasonic transducers,"in Ultrasonics Symposium, 2001 IEEE, Atlanta GA, pp.859862, vol.2, 710 Oct. 2001.

S.T. Hansen, A.S. Ergun, and B.T. KhuriYakub, "Improved modeling and design of microphones using radio frequency detection with capacitive micromachined ultrasonic transducers,"in Ultrasonics Symposium, 2001 IEEE, Atlanta GA, vol.2, pp.961964, 710 Oct. 2001.

U. Demirci, O. Oralkan, J.A. Johnson, A.S. Ergun, M. Karaman, and B.T. KhuriYakub, "Capacitive micromachined ultrasonic transducer arrays for medical imaging: experimental results,"in Ultrasonics Symposium, 2001 IEEE, Atlanta GA, vol.2, pp.957960, 710 Oct. 2001.

G.G. Yaralioglu, A.S. Ergun, B. Bayram, T. Marentis, and B.T. KhuriYakub, "Residual stress and Young's modulus measurement of capacitive micromachined ultrasonic transducer membranes,"in Ultrasonics Symposium, 2001 IEEE, Atlanta GA, vol.2, pp.953956, 710 Oct. 2001.

B.T. KhuriYakub, M. Karaman, C.H. Cheng, S. Ergun, G.G. Yaralioglu, B.Bayram, U. Demirci, S. Hansen, M. Badi, O. Oralkan, "Micromachine Capacitor Ultrasonic Transducers,"10thUSJapan Seminar on Dielectric and Piezoelectric Ceramics, Providence, Rhode Island (September 2629, 2001); in Program and Extended Abstracts of The 10th USJapan Seminar on Dielectric and Piezoelectric Ceramics, pp.391399, .

B. Bayram, G.G. Yaralioglu, A.S. Ergun, and B.T. KhuriYakub, "Influence of the electrode size and location on the performance of a cMUT [US transducer],"in Ultrasonics Symposium, 2001 IEEE, Atlanta GA, vol.2, pp.949952, 710 Oct. 2001.

G. Percin, and B.T. KhuriYakub, "Micromachined piezoelectrically actuated flextensional transducers for high resolution printing and imaging,"in Ultrasonics Symposium, 2001 IEEE , Atlanta GA, vol.2, pp.921924, 710 Oct. 2001.

G. Percin, and B.T. KhuriYakub, "Piezoelectrically actuated flextensional MUTs,"Ultrasonics Symposium, 2001 IEEE, Atlanta GA, vol.2, pp.903906, 710 Oct. 2001.

G. Percin, and B.T. KhuriYakub, "Micromachined piezoelectrically actuated flextensional transducers for high resolution printing,"in NIP 17 : International Conference on Digital Printing Technologies (Fort Lauderdale, FL), pp. 673  678, Sep. 30  Oct. 5, 2001.

G. Percin, and B.T. KhuriYakub, "Piezoelectrically actuated flextensional micromachined ultrasonic transducers (PAFMUTs),"in UI '01 : Ultrasonics International, MicroMachined Ultrasonics Transducers, Delft, The Netherlands, , Jul. 2  5, 2001.

S. Hansen, A.S. Ergun, and B.T. KhuriYakub, "Sensitive, Wideband Micromachined Capacitive Microphones Using Radio Frequency Detection,"in Sensor 2001, Nuremburg, Germany, 810 May. 2001; in Sensor 2001 Proceedings (Herausgeber, Germany), pp. 11 – 16, 2001.

G. Percin, and B.T. KhuriYakub, "Micromachined fluid ejector arrays for biotechnological and biomedical applications,"in 221st American Chemical Society National Meeting : Advances in Sensor Array Technologies, San Diego, CA, , Apr. 1  5, 2001.

G. Percin, and B.T. KhuriYakub, "BioMEMS ejectors for biotech / biomed applications,” in Cambridge Healthtech Institute's Fourth Annual Genomic Partnering : Emerging and EarlyStage Companies, San Francisco, CA,", , Mar. 3  4, 2001.

S.T. Hansen, A.S. Ergun, and B.T. KhuriYakub, B.T., "Acoustic sensing using radio frequency detection and capacitive micromachined ultrasonic transducers,"in Microwave Symposium Digest, 2001 IEEE MTTS International, vol.3, pp.22432246, 2001.

C.H, Cheng, A.S. Ergun, and B.T. KhuriYakub, "Electrical throughwafer interconnects with subpicofarad parasitic capacitance [MEMS packaging],"in Microelectromechanical Systems Conference, pp.1821, 2001, 2001.

X.C. Jin, O. Oralkan, F.L. Degertekin, and B.T. KhuriYakub, "Characterization of onedimensional capacitive micromachined ultrasonic immersion transducer arrays,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.48, no.3, pp.750760, May 2001.

G.G. Yaralioglu, M.H. Badi, A.S. Ergun, C.H. Cheng, B.T. KhuriYakub, and F.L. Degertekin, "Lamb wave devices using capacitive micromachined ultrasonic transducers,"Appl. Phys. Lett., vol. 78, pp. 111  113, Jan. 2001.

G. Percin, and B.T. KhuriYakub, "Piezoelectrically actuated flextensional micromachined ultrasound transducers. I. Theory,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol. 49, no. 5, pp.573584, May 2002.

G. Percin, and B.T. KhuriYakub, "Piezoelectrically actuated flextensional micromachined ultrasound droplet ejectors,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.49, no.6, pp.756766, Jun 2002.

G. Percin, and B.T. KhuriYakub, "Piezoelectrically actuated flextensional micromachined ultrasound transducers. II. Fabrication and experiments,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.49, no.5, pp.585595, May 2002.

G. Percin, and B.T. KhuriYakub, "Micromachined droplet ejector arrays for controlled inkjet printing and deposition,"Rev. Sci. Instrum., also in Virtual Journal of Nanoscale Science & Technology, vol. 5, vol. 73, pp. 2193  2196, May 6, 2002.

J.A. Johnson, O Oralkan, U. Demirci, S. Ergun, M. Karaman, and B.T. KhuriYakub, "Medical imaging using capacitive micromachined ultrasonic transducerarrays,"Ultrasonics, vol. 40, pp. 471  476, May 2002.

Y. Roh, and B.T. KhuriYakub, "Finite element analysis of underwater capacitor micromachined ultrasonic transducers,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on , vol.49, no.3, pp.293298, Mar 2002.

G. Percin, and B.T. KhuriYakub, "Piezoelectrically actuated flextensional micromachined ultrasonic transducers,"Ultrasonics, vol. 40, pp. 441  448, Feb. 2002.

B. T. KhuriYakub, M. Karaman, C. H. Cheng, A. S. Ergun, G. G. Yaralioglu, B. Bayram, U. Demirci, S. Hansen, M. Badi, Ö. Oralkan, "Micromachined Capacitor Ultrasonic Transducers,"10th USJapan Seminar on Dielectric and Piezoelectric Ceramics, Providence, RI (Sep. 26  29, 2001); in Program and Extended Abstracts of the 10th USJapan Seminar on Dielectric and Piezoelectric Ceramics, pp. 391  399, .

G. Perçin, B. T. KhuriYakub, "Piezoelectrically Actuated Flextensional Micromachined Ultrasound Transducers (PAFMUTs),"UI '01 : Ultrasonics International, Micromachined Ultrasonics Transducers, Delft, The Netherlands, , Jul. 2  5, 2001.

G. Perçin, B. T. KhuriYakub, "Micromachined Fluid Ejector Arrays for Biotechnological and Biomedical Applications,"221st American Chemical Society National Meeting, Advances in Sensor Array Technologies, San Diego, CA, , Apr. 1  5, 2001.

B. T. KhuriYakub, A. S. Ergun, C. H. Cheng, Ö. Oralkan, G. Perçin, S. Hansen, M. Badi, U. Demirci, "Microfabricated Ultrasonic Transducers : Past, Present, and Future,"1st International Workshop on Microfabricated Ultrasonic Transducers, Rome, Italy, , May 10  11, 2001.
2000

G.G. Yaralioglu, F.L. Degertekin, M.H. Badi, B.A. Auld, and B.T. KhuriYakub, "Finite element method and normal mode modeling of capacitive micromachined SAW and Lamb wave transducers,"in Ultrasonics Symposium, 2000 IEEE , San Juan, Puerto Rico, vol.1, pp.129132, 2225 Oct. 2000.

M.H. Badi, G.G. Yaralioglu, A.S. Ergun, F.L. Degertekin, C.H. Cheng, and B.T. KhuriYakub, "A first experimental verification of micromachined capacitive Lamb wave transducers,"in Ultrasonics Symposium, 2000 IEEE, San Juan, Puerto Rico, vol.1, pp.311314, Oct. 22  25, 2000.

C.H. Cheng, E.M. Chow, X.C. Jin, A.S. Ergun, and B.T. KhuriYakub, "An efficient electrical addressing method using throughwafer vias for twodimensional ultrasonic arrays,"Ultrasonics Symposium, 2000 IEEE , San Juan, Puerto Rico, vol.2, pp.11791182, 2225 Oct. 2000.

O. Oralkan, X.C. Jin, K. Kaviani, A.S. Ergun, F.L. Degertekin, M. Karaman, and B.T. KhuriYakub, "Initial pulseecho imaging results with onedimensional capacitive micromachined ultrasonic transducer arrays,"in Ultrasonics Symposium, 2000 IEEE , San Juan, Puerto Rico, vol.1, pp.959962, 2225 Oct. 2000.

S.T. Hansen, A. Turo, F.L. Degertekin, and B.T. KhuriYakub, "Characterization of capacitive micromachined ultrasonic transducers in air using optical measurements,"Ultrasonics Symposium, 2000 IEEE , San Juan, Puerto Rico, vol.1, pp.947950, 2225 Oct. 2000.

A.S. Ergun, S.T. Hansen, and B.T. KhuriYakub, "RF detection for low frequency cMUTS and its comparison to traditional detection,"in Ultrasonics Symposium, 2000 IEEE , San Juan, Puerto Rico, vol.1, pp.935938, 2225 Oct. 2000.

Y. Roh, and B.T. KhuriYakub, "Finite element modeling of capacitor micromachined ultrasonic transducers,"in Ultrasonics Symposium, 2000 IEEE , San Juan, Puerto Rico, vol.1, pp.905908, 2225 Oct. 2000.

G. Percin, and B.T. KhuriYakub, "Micromachined 2Dimensional array droplet ejectors for controlled deposition of fluids and solid particles,"in Cambridge Healthtech Institute's First Annual Macro Results from Micro Arrays Conference : Establishing Leads for Drug Development, Cambridge, MA, , Apr. 3  5, 2000.

B.T. KhuriYakub, C.H. Cheng, F.L. Degertekin, A.S. Ergun, S.T. Hansen, X.C. Jin, and O. Oralkan, "Silicon micromachined ultrasonic transducers,"in ASME International Mechanical Engineering Congress and Exposition, Orlando, FL, Nov. 5  10, 2000; in ASME Noise Control and Acoustic Division  2000, NCA, NY, vol. 27, pp. 153  171, .

B.T. KhuriYakub, C.H. Cheng, F.L. Degertekin, A.S. Ergun, S.T. Hansen, X.C. Jin, O. Oralkan, "Silicon Micromachined Ultrasonic Transducers,"in Fifth European Conference on Underwater Acoustics, Lyon, France, pp. 1367 – 1372, 1013 Jul. 2000.

J.P. Raskin, A.R. Brown, and B.T. KhuriYakub, G.M. Rebeiz, "A novel parametriceffect MEMS amplifier,"Microelectromechanical Systems, Journal of, vol.9, no.4, pp.528537, Dec 2000.

B.T. KhuriYakub, C.H. Cheng, F.L. Degertekin, A.S. Ergun, S.T. Hansen, X.C. Jin, O. Oralkan, "Silicon micromachined ultrasonic transducers,"Jpn. J. Appl. Phys., vol. 39, pp. 2883  2887, May 2000.

B. T. KhuriYakub, "Silicon Micromachined Ultrasonic Transducers for Bulk, Lamb, and Rayleigh Waves,"Acoustical Society of America Meeting, Newport Beach, CA, , Dec. 3  8, 2000.

B. T. KhuriYakub, C. H. Cheng, F. L. Degertekin, A. S. Ergun, S. Hansen, X. Jin, Ö. Oralkan, "Silicon Micromachined Ultrasonic Transducers,"Jpn. J. Appl. Phys., vol. 39, pp. 2883  2887, May 2000.
1999

S.T. Hansen, B.J. Mossawir, A.S. Ergun, F.L. Degertekin, and B.T. KhuriYakub, "Aircoupled nondestructive evaluation using micromachined ultrasonic transducers,"in Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE, vol.2, pp.10371040, 1999.

O. Oralkan, X.C. Jin, F.L. Degertekin, and B.T. KhuriYakub, "Simulation and experimental characterization of a 2D, 3MHz capacitive micromachined ultrasonic transducer (cMUT) array element,"in Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE, vol.2, pp.11411144, 1999.

S. Calmes, C.H. Cheng, F.L. Degertekin, X.C. Jin, A.S. Ergun, and B.T. KhuriYakub, "Highly integrated 2D capacitive micromachined ultrasonic transducers,"in Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE, vol.2, pp.11631166, 1999.

X.C. Jin, C.H. Cheng, O. Oralkan, S. Calmes, F.L. Degertekin, and B.T. KhuriYakub, "Recent Progress in Capacitive Micromachined Ultrasonic Immersion Transducer Arrays,"in the Eighth International Symposium on Integrated Circuits, Devices, and Systems, Singapore, Malaysia, pp. 159 – 162, 810 Sept. 1999.

S.L. Morton, F.L. Degertekin, and B.T. KhuriYakub, "Ultrasonic monitoring of photoresist processing,"in Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, vol. 3677, pp. 340347, June 1999.

S.T. Hansen, F.L. Degertekin, and B.T. KhuriYakub, "Micromachined ultrasonic transducers for aircoupled nondestructive evaluation,"in Proceedings of SPIE, Nondestructive Evaluation of Aging Aircraft, Airports, and Aerospace Hardware III, Ajit K. Mal, Editor, vol. 3586, pp. 310318, January 1999.

S.L. Morton, F.L. Degertekin, and B.T. KhuriYakub, "Ultrasonic sensor for photoresist process monitoring,"Semiconductor Manufacturing, IEEE Transactions on, vol.12, no.3, pp.332339, Aug 1999.

A. Bozkurt, I. Ladabaum, A. Atalar, and B.T. KhuriYakub, "Theory and analysis of electrode size optimization for capacitive microfabricated ultrasonic transducers,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.46, no.6, pp.13641374, Nov 1999.

B. T. KhuriYakub, "Silicon Micromachined Ultrasonic Transducers,"Ultrasonics International '99 with 1999 World Congress on Ultrasonics, Copenhagen, Denmark, , Jun. 29  Jul. 1, 1999.

B. T. KhuriYakub, "Material Characterization Using Micromachined Air Transducers,"137th Meeting of the Acoustical Society of America, Berlin, Germany, , Mar. 14  19, 1999.

B. T. KhuriYakub, F. L. Degertekin, X. Jin, S. Calmes, I. Ladabaum, S. Hansen, X. Zhang, "Silicon Micromachined Ultrasonic Transducers,"IEEE Ultrasonics Symposium, Sendai, Japan, Oct. 5  8, 1998, in 1999 Ultrasonics Symposium Proceedings, S. C. Schneider, M. Levy, B. R. McAvoy, eds., Inst. of Electrical and Electronics Engineers, Inc., New York, pp. 985  991, 1979.
1998

X.C. Jin, F.L. Degertekin, S. Calmes, X.J. Zhang, I. Ladabaum, and B.T. KhuriYakub, "Micromachined capacitive transducer arrays for medical ultrasound imaging,"in Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE, vol.2, pp.18771880, 1998.

A. Bozkurt, F.L. Degertekin, A. Atalar, and B.T. KhuriYakub, "Analytic modeling of loss and crosscoupling in capacitive micromachined ultrasonic transducers,"in Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE, vol.2, pp.10251028, 1998.

S.T. Hansen, N. Irani, F.L. Degertekin, I. Ladabaum, and B.T. KhuriYakub, "Defect imaging by micromachined ultrasonic air transducers,"in Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE, vol.2, pp.10031006, 1998.

B.T. KhuriYakub, F.L. Degertekin, X.C. Jin, S. Calmes, I. Ladabaum, S.T. Hansen, and X.J. Zhang, "Silicon micromachined ultrasonic transducers,"in Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE, vol.2, pp.985991, 1998.

X.C. Jin, I. Ladabaum, and B.T. KhuriYakub, "Surface micromachined capacitive ultrasonic immersion transducers,"in Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on, pp.649654, 2529 Jan. 1998.

G. Percin, and B.T. KhuriYakub, "Micromachined 2D array piezoelectrically actuated flextensional transducers and inkjet print heads,"in the 194th Meeting of the Electrochemical Society, Boston, MA, Nov. 1  6, 1998; Electrochemical Society Proceedings (The Electrochemical Society, Inc., New Jersey, 1998), vol. 9814, pp. 87 – 93, 1998.

X.C. Jin, I. Ladabaum, F.L. Degertekin, S. Calmes, and B.T. KhuriYakub, "Recent progress in surface micromachined capacitive ultrasonic transducers,"in the IEEE International Conference on Solid State and Integrated Circuit Technology, Beijing, China, Oct. 21  23, 1998; in Proceedings of IEEE International Conference on Solid State and Integrated Circuit Technology (Institute of Electrical and Electronics Engineers, Inc., New York, 1998), , pp. 880 – 883.

X.C. Jin, B.T. KhuriYakub, F.L. Degertekin, I. Ladabaum, and S. Calmes, "Micromachined capacitive ultrasonic immersion transducer for medical imaging,"in the IEEE International Conference on Engineering in Medicine and Biology, Hong Kong, China, Oct. 29  Nov. 1, 1998; in Proceedings of the 20th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, (Institute of Electrical and Electronics Engineers, Inc., New York, 1998), vol. 20, pp. 779 – 782, .

G. Percin, and B.T. KhuriYakub, "Micromachined 2D array piezoelectrically actuated flextensional transducers : New designs,"in the SPIE Conference on Micromachined Devices and Components IV, Santa Clara, CA, Sep. 21  22, 1998; in SPIE Proceedings on Micromachined Devices and Components IV, vol. 3514 (SPIE, Washington, 1998), pp. 411 – 414, .

B.T. KhuriYakub, X.C. Jin, I. Ladabaum, and F.L. Degertekin, "Micromachined capacitive immersion ultrasonic transducers,"in the SPIE Conference on Ultrasonic Transducer Engineering, San Diego, CA, Feb. 25  26, 1998; in SPIE Proceedings on Ultrasonic Transducer Engineering, (SPIE, Washington, 1998), vol, 3341, pp. 237 – 241, .

G. Percin, T. Soh, and B.T. KhuriYakub, "Resist deposition without spinning by using novel inkjet technology and direct lithography for MEMS,"in the SPIE Conference on Advances in Resist Technology and Processing XV, Santa Clara, CA, Feb. 23  25, 1998; in SPIE Proceedings on Advances in Resist Technology and Processing XV, (SPIE, Washington, 1998), vol. 3333, pp. 1382 – 1339, .

S. Morton, F.L. Degertekin, and B.T. KhuriYakub, "Ultrasonic cure and temperature monitoring of photoresist during preexposure bake process,"in the SPIE Conference on Metrology, Inspection, and Process Control for Microlithography XII, Santa Clara, CA, Feb. 23  25, 1998; in SPIE Proceedings on Metrology, Inspection, and Process Control for Microlithography XII, (SPIE, Washington, 1998), vol. 3332, pp. 254 – 261, .

P.E. Roche, A. Hansson, and B.T. KhuriYakub, "Control of a drop ejector used as a photoresist dispenser,"in Proceedings of SPIE, Smart Structures and Materials 1998: Mathematics and Control in Smart Structures, Vasundara V. Varadan, Editor, vol. 3323, pp. 446454, July 1998.

G. Percin, T.H. Soh, and B.T. KhuriYakub, "Resist deposition without spinning by using novel inkjet technology and direct lithography for MEMS,"in Proceedings of SPIE, Advances in Resist Technology and Processing XV, Will Conley, Editor, vol. 3333, pp. 13821389, June 1998.

G. Percin, T.S. Lundgren, and B.T. KhuriYakub, "Controlled inkjet printing and deposition of organic polymers and solid particles,"Appl. Phys. Lett., vol. 73, pp. 2375  2377, Oct. 1998.

S.L. Morton, F.L. Degertekin, and B.T. KhuriYakub, "In situ ultrasonic monitoring of photoresist development,"Appl. Phys. Lett., vol. 73, pp. 2215  2217, Oct. 1998.

X.C. Jin, I. Ladabaum, and B.T. KhuriYakub, "The microfabrication of capacitive ultrasonic transducers,"Microelectromechanical Systems, Journal of , vol.7, no.3, pp.295302, Sep. 1998.

F.L. Degertekin, A. Atalar, and B.T. KhuriYakub, "Micromachinable ultrasonic leaky wave air transducers,"Appl. Phys. Lett., vol. 73, pp. 741  743, Aug. 1998.

B. T. KhuriYakub, "Silicon Micromachined Ultrasonics Transducers,"16th International Congress on Acoustics and the 135th Meeting of the Acoustical Society of America, Seattle, WA, , Jun. 20  26, 1998.

B. T. KhuriYakub, G. Birnbaum, B. A. Auld, "Micromachined Capacitive Ultrasonic Air Transducers. In Sensing for Materials Characterization, Processing and Manufacturing," eds. (The American Society for Nondestructive Testing, Inc., Columbus, OH), pp. 113  123, 1998.
1997

X.C. Jin, I. Ladabaum, and B.T. KhuriYakub, "The microfabrication of capacitive ultrasonic transducers,"in Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on, vol.1, pp.437440, 1619 Jun 1997.

S.L. Morton, F.L. Degertekin, and B.T. KhuriYakub, "Ultrasonic cure monitoring of photoresist during preexposure bake process,"in Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE, vol.1, pp.837840, 58 Oct 1997.

I. Ladabaum, X.C. Jin, and B.T. KhuriYakub, "Air coupled through transmission of aluminum and other recent results using MUTs,"in Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE, vol.2, pp.983986, 58 Oct 1997.

F.L. Degertekin, A. Atalar, and B.T. KhuriYakub, "Micromachinable Leaky Wave Air Transducers,"in Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE, vol.2, pp.975978, 58 Oct 1997.

A. Ronnekleiv, P.E. Roche, and B.T. KhuriYakub, "Analysis of micro machinable piezoelectrically driven one dimensional flexural transducers,"in Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE, vol.2, pp.10611065, 58 Oct 1997.

P.M. Roche, and B.T. KhuriYakub, "Nonlinear dynamics of flexural disc transducers,"in Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE, vol.2, pp.971974, 58 Oct 1997.

G. Percin, and B.T. KhuriYakub, "Micromachined 2D array piezoelectrically actuated flextensional transducers,"in Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE, vol.2, pp.959962, 58 Oct 1997.

J. Pei, and B.T. KhuriYakub, "Plate thickness and transducer distance dual inversion with dry contact ultrasonic Lamb wave transducers,"in Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE, vol.2, pp.10211024, 58 Oct 1997.

I. Ladabaum, X.C. Jin, and B.T. KhuriYakub, "Progress in microfabricated ultrasonic transducers,"in the 134th Meeting of the Acoustical Society of America, San Diego, CA, , Dec. 1  5, 1997.

A. Rinnekleiv, I. Ladabaum, X.C. Jin, B.T. KhuriYakub, "An Improvei circuit model of MUTs,"in the IEEE Ultrasonics Symposium, Ontatio, Canada, Oct. 5  8, 1997; in 1997 Ultrasonics Symposium Proceedings (Institute of Electrical and Electronics Engineers, Inc., New York, 1997), pp. 395 – 399, 1997.

B.T. KhuriYakub, F.L. Degertekin, and J. Pei, "Novel Applications of Lamb Waves in Process Monitoring,"in PIERS '97, Cambridge, MA, Jul. 7  11, 1997; in Proceedings of PIERS, Progress in Electromagnetics Research Symposium (SchlumbergerDoll Research, Ridgefield, CT, 1997), p. 321, 1997, .

R.L. Crane, J.D. Achenbach, S.P. Shah, T.E. Matikas, B.T. KhuriYakub, and R.S. Gilmore, "Proceedings of the 1997 MRS Fall Meeting,"in Proceedings of the 1997 MRS Fall Meeting, Boston, MA, USA, , Nov 30Dec 4 1997.

I. Ladabaum, X.C. Jin, and B.T. KhuriYakub, "Miniature drumheads: Microfabricated ultrasonic transducers,"in Ultrasonics International '97, Delft, The Netherlands, Jul. 2  4, 1997; in Ultrasonics 36, , 25 – 29 Feb. 1998.

G. Percin, L. Levin, and B.T. KhuriYakub, "Piezoelectrically actuated droplet ejector,"Rev. Sci. Instrum., vol. 68, pp. 4561  4563, Dec. 1997.

V. Subramanian, P. Dankoski, L. Degertekin, B.T. KhuriYakub, and K.C. Saraswat, "Controlled twostep solidphase crystallization for highperformance polysilicon TFT's,"Electron Device Letters, IEEE, vol.18, no.8, pp.378381, Aug 1997.

F.L. Degertekin, and B.T. KhuriYakub, "Lamb wave excitation by Hertzian contacts with applications in NDE,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.44, no.4, pp.769779, Jul 1997.

V. Subramanian, F.L. Degertekin, P. Dankoski, B.T. KhuriYakub, and K.C. Saraswat, "In Situ Monitoring of Crystallinity and Temperature During Rapid Thermal Crystallization of Silicon on Glass,"J. Electrochem. Soc., vol. 144, pp. 2216  2221, Jun. 1997.

I. Ladabaum, X.C. Jin, H.T. Soh, A. Atalar, and B.T. KhuriYakub, "Surface micromachined capacitive ultrasonic transducers,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.45, no.3, pp.678690, May 1998.

S.L. Morton, F.L. Degertekin, and B.T. KhuriYakub, "In situ ultrasonic measurement of photoresist glass transition temperature,"Appl. Phys. Lett., vol. 72, pp. 2457  2459, May 1998.

G. Percin, A. Atalar, F.L. Degertekin, and B.T. KhuriYakub, "Micromachined twodimensional array piezoelectrically actuated transducers,"Appl. Phys. Lett., vol. 72, pp. 1397  1399, Mar. 1998.

I. Ladabaum, X.C. Jin, and B.T. KhuriYakub, "Miniature drumheads : microfabricated ultrasonic transducers,"Ultrasonics, vol. 36, pp. 25  29, Feb. 1998.

B. T. KhuriYakub, "Novel Ultrasonics Sensors and Actuators in the Microelectronics Industry,"Ultrasonics International '97, Delft, The Netherlands, , Jul. 2  4, 1997.
1996

G. Percin, L. Levin, and B.T. KhuriYakub, "Piezoelectrically actuated transducer and droplet ejector,"in Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE, vol.2, pp.913916, 36 Nov 1996.

S.L. Morton, A. Hansson, and B.T. KhuriYakub, "Ultrasonic monitoring of photoresist prebake using TOF measurement,"in Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE, vol.2, pp.10131016, 36 Nov 1996.

F.L. Degertekin, B.V. Honein, and B.T. KhuriYakub, "Application of surface impedance approach to ultrasonic wave propagation in layered anisotropic media,"in Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE, vol.1, pp.559562, 36 Nov 1996.

J. Pei, B.T. KhuriYakub, F.L. Degertekin, B.V. Honein, F.E. Stanke, and K.C. Saraswat, "In situ simultaneous measurement of temperature and thin film thickness with ultrasonic techniques,"in Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE, vol.2, pp.10391042, 36 Nov 1996.

I. Ladabaum, X.C. Jin, H.T. Soh, F. Pierre, A. Atalar, and B.T. KhuriYakub, "Microfabricated ultrasonic transducers: towards robust models and immersion devices,"in Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE, 36 Nov 1996, vol.1, pp.335338.

B.T. KhuriYakub, J. Pei, F.L. Degertekin, and K.C. Saraswat, "In situ simultaneous measurement of temperature and thin film thickness with ultrasonic techniques,"in the SPIE Conference on Nondestructive Evaluation for Processing Control in Manufacturing, Scottsdale, AZ, Dec. 3  5, 1996; in SPIE Proceedings on Nondestructive Evaluation for Processing Control in Manufacturing, (SPIE, Washington, 1996), vol. 2948, pp. 131 – 135, 1996.

J. Pei, F.L. Degertekin, B.V. Honein, and B.T. KhuriYakub, "Erosion / corrosion monitorina with dry contact ultrasonic lamb wave transducers,"in the SPIE Conference on Nondestructive Evaluation of Aging Aircraft, Airport, and Aerospace Harware, Scottsdale, AZ, Dec. 3  5, 1996; in SPIE Proceedings on Nondestructive Evaluation of Aging Aircraft, Airport, and Aerospace Hardware, (SPIE, Washington, 1996), vol. 2945, pp. 428 – 435, .

V. Subramanian, F.L. Degertekin, P. Dankoski, B.T. KhuriYakub, and K.C. Saraswat, "A novel technique for insitu monitoring of crystallinity and temperature during rapid thermal annealing of thin Si / SiGe films on quartz / glass,"in MRS 1996 Spring Meeting, San Francisco, CA, April 8  12, 1996; in Flat Panel Display Materials II Symposium Proceedings, pp. 267 – 272, April 8  12, 1996.

K.C. Saraswat, Y. Chen, and B.T. KhuriYakub, "Modeling, measurement and control of rapid thermal processing,"Transient Thermal Processing Techniques in Electronic Materials. Proceedings of Symposium. Held during the 1996 TMS Annual Meeting, Anaheim, CA, USA, p.310, 48 Feb. 1996.

H.T. Soh, I. Ladabaum, A. Atalar, C.F. Quate, and B.T. KhuriYakub, "Silicon micromachined ultrasonic immersion transducers,"Appl. Phys. Lett., vol. 69, pp. 3674  3676, Dec. 1996.

J. Pei, M.I. Yousuf, F.L. Degertekin, B.V. Honein, and B.T. KhuriYakub, "Lamb wave tomography and its application in pipe erosion / corrosion monitoring,"Res. Nondestr. Eval., vol. 8, pp. 189  197, Dec. 1996.

F.L. Degertekin, and B.T. KhuriYakub, "Single mode lamb wave excitation in thin plates by hertzian contacts,"Appl. Phys. Lett., vol. 69, pp. 146  148, Jul. 1996.

K. Yamada, and B.T. KhuriYakub, "Point Contact Ultrasonic Transducer of Waveguiding Structure for HighFreq. Operation,"Appl. Phys. Lett., vol. 68, pp. 1335  1337, Mar. 1996.

K. C. Saraswat, Y. Chen, B. T. KhuriYakub, "Modeling, Measurement and Control of Rapid Thermal Processing,"1996 TMS (The Mineral, Metals, and Materials Society) Annual Meeting, Anaheim, CA, Feb. 4  8, 1996; in Transient Thermal Processing Techniques in Electronic Materials, N. M. Ravindra and R. K. Singh, eds., pp. 3  10, 1996.

B. T. KhuriYakub, G. Wade, A. C. Wey, "Scanning Acoustical Microscopy," In Encyclopedia of Applied Physics, vol. 16, G. Trigg, ed. (VCH Publishers), pp. 545  571, 1996.
1995

K. Yamada, and B.T. KhuriYakub, "Point contact transducer of waveguiding structure for highfrequency operation,"in Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE, vol.2, pp.955959, 710 Nov 1995.

I. Ladabaum, B.T. KhuriYakub, D. Spoliansky, and M.I. Haller, "Micromachined ultrasonic transducers (MUTs),"in Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE, vol.1, pp.501504, 710 Nov 1995.

J. Pei, M.I. Yousuf, F.L. Degertekin, B.V. Honein, and B.T. KhuriYakub, "Lamb wave tomography and its application in pipe erosion/corrosion monitoring,"in Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE, vol.1, pp.795798, 710 Nov 1995.

F.K. Degertekin, B.V. Honein, and B.T. KhuriYakub, "Efficient excitation and detection of Lamb waves for process monitoring and NDE,"in Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE, vol.1, pp.787790, 710 Nov 1995.

D. Spoliansky, I. Ladabaum, and B.T. KhuriYakub, "Micromachined ultrasonic transducers (MUTs),"in the International Conference of Micro and Nanoengineering, Aix en Provence, France, Sep. 26  28, 1995; in Proceedings of the International Conference of Micro and Nanoengineering, J. Perrocheau, ed. (Elsevier, Holland, 1995), pp. 535 – 538, .

J. Pei, M.I. Yousuf, F.L. Degertekin, B.V. Honein, and B.T. KhuriYakub, "Plate tomography with dry contact lamb wave transducers,"in the Conference for Acoustic Imaging, Italy, Sep. 1995; in Acoustic Imaging, P. Tortoli and L. Masotti, eds. (Plenum Press, New York, 1996), vol. 22, pp. 725 – 730, .

J. Pei, F.L. Degertekin, B.V. Honein, and B.T. KhuriYakub, "Erosion / corrosion monitoring with dry contact ultrasonic lamb wave transducers,"in Review of Progress in Quantitative Nondestructive Evaluation, Seattle, WA, , Jul. 30  Aug. 4, 1995.

B.T. KhuriYakub, I. Ladabaum, and D. Spoliansky, "Micromachined ultrasonic air transducers,"in Review of Progress in Quantitative Nondestructive Evaluation, Seattle, WA, , Jul. 30  Aug. 4, 1995.

G. Posakony, T. Davis, B.T. KhuriYakub, and T. Taylor, "Insitu ultrasonic arrays for measuring erosion / corrosion in piping systems,"in the 1995 PVP Conference, Performance Demonstration for Wrought Austenetic Welds, , Jul. 1995.

P. Dankoski, F.L. Degertekin, B.T. KhuriYakub, G. Franklin, and K.C. Saraswat, "Toward RTP control using ultrasonic sensors,"in the RTP '95 Conference, Amsterdam, The Netherlands, Aug. 30  Sep. 1, 1995; in RTP '95 Conference Proceedings, pp. 237 – 240, .

F.L. Degertekin, P. Dankoski, B.T. KhuriYakub, and K.C. Saraswat, "In situ ultrasonic wafer temperature sensor for RTP,"in the RTP '95 Conference, Amsterdam, The Netherlands, Aug. 30  Sep. 1, 1995; in RTP '95 Conference Proceedings, pp. 234 – 236, 1995, .

K.C. Saraswat, Y. Chen, L. Degertekin, and B.T. KhuriYakub, "A new flexible rapid thermal processing system,"in the Modeling and Simulation of ThinFilm Processing, San Francisco, CA, Apr. 17  20, 1995; in Materials Research Society Symposium Proceedings, (Materials Research Society, Pennsylvania, 1995), vol. 389, pp. 307 – 319, .

K.C. Saraswat, Y. Chen, L. Degertekin, and B.T. KhuriYakub, "A new flexible rapid thermal processing system,"in the Modeling and Simulation of ThinFilm Processing, San Francisco, CA, Apr. 17  20, 1995; in Materials Research Society Symposium Proceedings, (Materials Research Society, Pennsylvania, 1995), vol. 387, pp. 3547, .

J. Pei, F.L. Degertekin, B.T. KhuriYakub, and K.C. Saraswat, "Insitu thin film thickness measurement with acoustic lamb waves,"Appl. Phys. Lett., vol. 66, pp. 2177  2179, Apr. 1995.

Y.J. Lee, B.T. KhuriYakub, and K. Saraswat, "Temperature measurement in rapid thermal processing using the acoustic temperature sensor,"Semiconductor Manufacturing, IEEE Transactions on, vol.9, no.1, pp.115121, Feb 1996.

M.I. Haller, and B.T. KhuriYakub, "A surface micromachined electrostatic ultrasonic air transducer,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.43, no.1, pp.16, Jan 1996.

I. Ladabaum, B.T. KhuriYakub, and D. Spoliansky, "Micromachined ultrasonic transducers (MUTs) : 11.4 MHz transmission in air and more,"Appl. Phys. Lett., vol. 68, pp. 7  9, Jan. 1996.

D. Spoliansky, I. Ladabaum, and B.T. KhuriYakub, "Micromachined ultrasonic air transducers (MUTs),"Microelectric Engineering, vol. 30, pp. 535  538, Jan. 1996.

F.L. Degertekin, and B.T. KhuriYakub, "Hertzian contact transducers for nondestructive evaluation,"J. Acoustical Society of America, vol. 99, pp. 299  308, Jan. 1996.

B. T. KhuriYakub, "Ultrasonic Air Transducers and Their Applications," Presented at ASNT School, to be published as a chapter in the book of the ASNT School on Sensors for Process and Monitoring Quality Control, Jun. 26  30, 1995.
1994

M.I. Haller, and B.T. KhuriYakub, "A surface micromachined electrostatic ultrasonic air transducer,"in Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE, 14 Nov 1994, vol.2, pp.12411244.

J. Pei, F.L. Degertekin, B.V. Honein, B.T. KhuriYakub, and K.C. Saraswat, "In situ thin film thickness measurement using ultrasonics waves,"in Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE, vol.2, pp.12371240, 14 Nov 1994.

F.L. Degertekin, B.V. Honein, and B.T. KhuriYakub, "Tilted sample acoustic microscopy for anisotropy measurement,"in Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE, pp.14331436, 14 Nov 1994, vol.3.

F.L. Degertekin, J. Pei, B.V. Honein, B.T. KhuriYakub, and K.C. Saraswat, "Thin film effects in ultrasonic wafer thermometry,"in Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE, vol.3, pp.13371341, 14 Nov 1994.

P.E. Roche, and B.T. KhuriYakub, "Propagation in finite anisotropic plates of diffracting scalar waves,"in Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE, vol.2, pp.679682, 14 Nov 1994.

Y. Chen, L. Booth, C. Schaper, B.T. KhuriYakub, and K.C. Saraswat, "3D modeling of rapid thermal processors for design optimization of a new flexible RTP system,"in Electron Devices Meeting, 1994. Technical Digest., International, pp.545548, 1114 Dec 1994.

K.C. Saraswat, P.P Apte, L. Booth, Y. Chen. P.C. Dankoski, F.L. Degertekin, G.F. Franklin, B.T. KhuriYakub, M.M. Moslehi, C. Schaper, P.J. Gyugyi, Y.J. Lee, J. Pei, and S.C. Wood, "Rapid thermal multiprocessing for a programmable factory for adaptable manufacturing of ICs,"Semiconductor Manufacturing, IEEE Transactions on, vol.7, no.2, pp.159175, May 1994.

Y.J. Lee, B.T. KhuriYakub , and K.C. Saraswat, "Temperature measurement in rapid thermal processing using acoustic techniques,"Review of Scientific Instruments, vol.65, no.4, pt.1, p.9746, April 1994.
1993

T. Hoshimiya, and B.T. KhuriYakub, "V(z) calculation for a focused beam incident on an inclined plane,"in Ultrasonics Symposium, 1993. Proceedings., IEEE 1993, vol.1, pp.603606, 31 Oct3 Nov 1993.

B. Hadimioglu, E.G. Rawson, R. Lujan, M. Lim, J.C. Zesch, B.T. KhuriYakub, and C.F. Quate, "Highefficiency Fresnel acoustic lenses,"in Ultrasonics Symposium, 1993. Proceedings., IEEE 1993, vol.1, pp.579582, 31 Oct3 Nov 1993.

M.I. Haller, and B.T. KhuriYakub, "Tapered acoustic matching layers,"in Ultrasonics Symposium, 1993. Proceedings., IEEE 1993, vol.1, pp.505508, 31 Oct3 Nov 1993.

F.L. Degertekin, J. Pei, Y.J. Lee, B.T. KhuriYakub, and K.C. Saraswat, "Insitu ultrasonic thermometry of semiconductor wafers,"in Ultrasonics Symposium, 1993. Proceedings., IEEE 1993, vol.1, pp.375377, 31 Oct3 Nov 1993.

F.L. Degertekin, J. Pei, and B.T. KhuriYakub, "Material characterization using Hertzian point contact transducers,"in Ultrasonics Symposium, 1993. Proceedings., IEEE 1993, vol.1, pp.297299, 31 Oct3 Nov. 1993.

Y.J. Lee, F.L. Degertekin, J. Pei, B.T. KhuriYakub, and K.C. Saraswat, "Insitu acoustic thermometry and tomography for rapid thermal processing,"in Electron Devices Meeting, 1993. Technical Digest., International, pp.187190, 58 Dec 1993.

F.L. Degertekin, J. Pei, Y.J. Lee, B.T. KhuriYakub, and K.C. Saraswati, "Insitu temperature monitoring in RTP by acoustical techniques,"in Materials Research Society Symposium Proceedings, vol.303, p.133138, 1993.

B. Hadimioglu, and B.T. KhuriYakub, "Highfrequency ultrasonic techniques,"in Proceedings of the Ultrasonics International Conference, p.559562, 1993.

B.T. KhuriYakub, "Scanning acoustics microscopy,"Ultrasonics, vol.31, no.5, p.361372, Sept. 1993.

C.P. Hsieh, and B.T. KhuriYakub, "Onepoint contact measurement of spherical resonances,"Applied Physics Letters, vol.62, no.24, p.30913093, 14 June 1993.

C. Cinbis, N.N. Mansour, and B.T. KhuriYakub, "Effect of surface tension on the acoustic radiation pressureinduced motion of the waterair interface,"Journal of the Acoustical Society of America, vol.94, no.4, p.236572, Oct. 1993.

C. Cinbis, N.N. Mansour, and B.T. KhuriYakub, "Effect of surface tension on the acoustic radiation pressureinduced motion of the waterair interface,"Journal of the Acoustical Society of America, vol.94, no.4, p.236572, Oct. 1993.
1992

M.I. Haller, and B.T. KhuriYakub, "Micromachined acoustic matching layers,"in Proceedings of SPIE, New Developments in Ultrasonic Transducers and Transducer Systems, Frederick L. Lizzi, Editor, vol. 1733, pp. 7277, November 1992.

B. Hadimioglu, S.A. Elrod, D.L. Steinmetz, M Lim, J.C. Zesch, B.T. KhuriYakub, E.G. Rawson, and C.F. Quate, "Acoustic ink printing,"in Ultrasonics Symposium, 1992. Proceedings., IEEE 1992, vol.2, pp.929935, 2023 Oct 1992.

M.I. Haller, and B.T. KhuriYakub, "13 composites for ultrasonic air transducers,"in Ultrasonics Symposium, 1992. Proceedings., IEEE 1992, vol.2, pp.937939, 2023 Oct 1992.

C.P. Hsieh, and B.T. KhuriYakub, "Single point contact measurements of mechanical resonances,"in Ultrasonics Symposium, 1992. Proceedings., IEEE 1992, vol.2, pp.787789, 2023 Oct 1992.

B.T. KhuriYakub S. Akamine, B. Hadimioglu, H. Yamada and C.F. Quate, "Nearfield acoustic microscopy,"in Proceedings of SPIE, Scanning Microscopy Instrumentation, Gordon S. Kino, Editor, vol. 1556, pp. 3039, February 1992.

C.P. Hsieh, and B.T. KhuriYakub, "Surface defect inspection of spherical objects by the resonant sphere technique,"Applied Physics Letters, vol.60, no.15, p.18151817, 13 Apr. 1992.

C. Cinbis and B.T. KhuriYakub, "A noncontacting technique for measuring surface tension of liquids,"Review of Scientific Instruments, vol.63, no.3, p.20482050, Mar. 1992.

C. Cinbis and B.T. KhuriYakub, "A noncontacting technique for measuring surface tension of liquids,"Review of Scientific Instruments, vol.63, no.3, p.20482050, Mar. 1992.
1991

C.P. Hsieh, C.H. Chou, and B.T. KhuriYakub, "Novel technique of NDE in ceramic bearing balls,"in Ultrasonics Symposium, 1991. Proceedings., IEEE 1991, vol.2, pp.891894, 811 Dec 1991.

M.I. Haller, and B.T. KhuriYakub, "Micromachined ultrasonic materials,"in Ultrasonics Symposium, 1991. Proceedings., IEEE 1991, vol.1, pp.403405, 811 Dec 1991.

S. Bhardwaj, S.S. Mohan, R.J. Drozd, B.T. KhuriYakub, and K.C. Saraswat, "Insitu film thickness and temperature monitoring using a 2 GHz acoustic phase measurement system,"in Ultrasonics Symposium, 1991. Proceedings., IEEE 1991, vol.2, pp.965967, 811 Dec 1991.

J.C. Zesch, B. Hadimioglu, B.T. KhuriYakub, M. Lim, R. Lujan, J. Ho, S. Akamine, D. Steinmetz, C.F. Quate, and E.G. Rawson, "Deposition of highly oriented lowstress ZnO films,"in Ultrasonics Symposium, 1991. Proceedings., IEEE 1991, vol.1, pp.445448, 811 Dec 1991.

S. Akamine, B. Hadimioglu, B.T. KhuriYakub, H. Yamada, and C.F. Quate, "Acoustic microscopy beyond the diffraction limit: an application of microfabrication,"in SolidState Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on, pp.857859, 2427 Jun 1991.

S. Bhardwaj, and B.T. KhuriYakub, "Insitu film thickness measurements using acoustic techniques,"in Proceedings of SPIE, Advanced Techniques for Integrated Circuit Processing, James A. Bondur, Terry R. Turner, Editors, vol. 1392, pp. 555562, March 1991.

Y.J. Lee, C.H. Chou, B.T. KhuriYakub, and K.C. Saraswat, "Noncontacting acousticsbased temperature measurement techniques in rapid thermal processing,"in Proceedings of SPIE, Rapid Thermal and Related Processing Techniques, Rajendra Singh, Mehrdad M. Moslehi, Editors, vol. 1393, pp. 366371, April 1991.

P.A. Reinholdtsen, and B.T. KhuriYakub, "Image processing for a scanning acoustic microscope that measures amplitude and phase,"Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, vol.38, no.2 pp.141147, Mar 1991.

B. T. KhuriYakub, C. F. Quate, "eds. Selected Papers on Scanning Acoustic Microscopy," In SPIE Milestone Series, vol. MS53 (SPIE), pp. 323  328, 1991.

B. T. KhuriYakub, "Nondestructive Evaluation," In Concise Encyclopedia of Advanced Ceramic Materials, R. J. Brook, ed. (Pergammon Press, New York), pp. 323  328., 1991.

B. T. KhuriYakub, "Air Coupled Transducers," In Nondestructive Testing Handbook, vol. 7, P. McIntire, ed. (American Society for Nondestructive Testing), pp. 320  325. , 1991.
1986

B. T. KhuriYakub, "Ceramics : Nondestructive Evaluation," In Encyclopedia of Materials Science and Engineering, vol. 1 (A  Co), M. B. Bever, ed. (Pergammon Press, New York), pp. 595  600, 1986.